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    Effect of deposition conditions on optical properties of a-C:H:SiOx films prepared by plasma-assisted chemical vapor deposition method

    Effect of deposition conditions on optical properties of a-C:H:SiOx films prepared by plasma-assisted chemical vapor deposition method 由 Grenadyorov A. S. Aleksandr Sergeevich

    出版 2018
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    电子 本书章节

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