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- energy impact 5
- radiation-stimulated diffusion
- труды учёных ТПУ 5
- электронный ресурс 5
- deep ion doping 4
- ion implantation 4
- dynamics of temperature fields 3
- vacuum arc 3
- infrared pyrometer 2
- modification of surface 2
- near-surface layers 2
- numerical simulation 2
- self-diffusion 2
- silicon 2
- surface modification 2
- temperature field dynamics 2
- thermal processes 2
- titanium 2
- titanium ions 2
- ионная имплантация 2
- энергетическое воздействие 2
- arc discharge 1
- diffusion of atoms 1
- implantation 1
- synergy 1
- глубокое ионное легирование 1
- динамика температурных полей 1
- диффузия атомов 1
- кремний 1
- модификация поверхности 1
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Modification of silicon under synergy of high-intensity implantation of titanium ions and energy influence of a high-power ion beam on a surface
Published 2024Get full text
Electronic Book Chapter -
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High-Intensity Titanium Ion Implantation into Aluminum under Conditions of Repetitively-Pulsed Energy Impact of a Beam on the Surface
Published 2024Get full text
Electronic Book Chapter -
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Investigation of High-Intensity Implantation of Titanium Ions into Silicon under Conditions of Beam Energy Impact on the Surface
Published 2024Get full text
Статья на русском языке
Electronic Book Chapter