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Suggested Topics within your search.
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- evaporation 3
- magnetron sputtering systems
- труды учёных ТПУ 3
- электронный ресурс 3
- магнетронные распылительные системы 2
- Cu films and coatings 1
- Cu films electrical resistance 1
- coatings deposition 1
- film growth 1
- high purity coatings 1
- liquid-phase sputtering 1
- low-pressure magnetron sputtering 1
- metal films and coatings 1
- self-sputtering 1
- self-sustained sputtering 1
- sputtering 1
- выпаривание 1
- испарение 1
- магнетронные системы 1
- металлические пленки 1
- мишени 1
- напыление 1
- низкое давление 1
- осаждение 1
- пленки 1
- покрытия 1
- распыление 1
- распылительные системы 1
- электрическое сопротивление 1
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1
The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering
Published 2018Get full text
Electronic Book Chapter -
2
Controlling the Properties of Metal Films Deposited Using Magnetron Sputtering Systems with Evaporative Targets
Published 2019Get full text
Electronic Book Chapter -
3
The properties of Cu films deposited by high rate magnetron sputtering from a liquid target
Published 2019Get full text
Electronic Book Chapter