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- MEMS
- труды учёных ТПУ 4
- электронный ресурс 4
- датчики 2
- Glass Etching 1
- Gold Sputtering 1
- Photoresist 1
- Silicon Oxide Mask 1
- Technological Errors 1
- accelerometers 1
- decoupling frames 1
- electromechanical sensors 1
- geodesic dome 1
- gyroscope 1
- gyroscopes 1
- heterointegration 1
- interval data 1
- packaging 1
- preference aggregation 1
- sensor data processing 1
- Электромеханика 1
- агрегирование предпочтений 1
- акселерометры 1
- английский язык 1
- гироскопы 1
- датчики движения 1
- дефекты 1
- золотые покрытия 1
- микроэлектромеханические гироскопы 1
- микроэлектромеханические датчики 1
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2
Influence of Technological Process for Microelectromechanical Sensors Manufacturing on their Technical Characteristics
Published 2019Get full text
Electronic Book Chapter -
3
A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames
Published 2019Get full text
Electronic Book Chapter -
4
Inertial MEMS Sensors Accuracy Improvement by Interval Fusion with Preference Aggregation
Published 2020Get full text
Electronic Book Chapter -
5
Wafer-Level Packaging of Microelectromechanical Systems Based on Frame Structure
Published 2024Get full text
Electronic Book Chapter