Micro Electro Mechanical Systems
| Údar corparáideach: | |
|---|---|
| Rannpháirtithe: | |
| Achoimre: | text |
| Teanga: | Béarla |
| Foilsithe / Cruthaithe: |
Singapore :
Springer Nature Singapore : Imprint: Springer,
2017.
|
| Sraith: | Micro/Nano Technologies,
2 |
| Ábhair: | |
| Rochtain ar líne: | https://doi.org/10.1007/978-981-10-2798-7 |
| Formáid: | Leictreonach LEABHAR |
Clár na nÁbhar:
- Device Physics
- Scaling effect
- Sensors
- Actuators
- RF MEMS
- Micro fluid and bio MEMS
- Integration techniques
- Micro systems.