Micro Electro Mechanical Systems
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| Other Authors: | |
| Summary: | text |
| Language: | English |
| Published: |
Singapore :
Springer Nature Singapore : Imprint: Springer,
2017.
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| Series: | Micro/Nano Technologies,
2 |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-981-10-2798-7 |
| Format: | Electronic eBook |
Table of Contents:
- Device Physics
- Scaling effect
- Sensors
- Actuators
- RF MEMS
- Micro fluid and bio MEMS
- Integration techniques
- Micro systems.