Micro Electro Mechanical Systems
| Institution som forfatter: | |
|---|---|
| Andre forfattere: | |
| Summary: | text |
| Sprog: | engelsk |
| Udgivet: |
Singapore :
Springer Nature Singapore : Imprint: Springer,
2017.
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| Serier: | Micro/Nano Technologies,
2 |
| Fag: | |
| Online adgang: | https://doi.org/10.1007/978-981-10-2798-7 |
| Format: | Electronisk Bog |
Indholdsfortegnelse:
- Device Physics
- Scaling effect
- Sensors
- Actuators
- RF MEMS
- Micro fluid and bio MEMS
- Integration techniques
- Micro systems.