Thermal Sensitivity of a Microoptoelectromechanical Evanescent-Coupling-Based Accelerometer; Sensors; Vol. 25, iss. 20
| Parent link: | Sensors.— .— Basel: MDPI AG Vol. 25, iss. 20.— 2025.— Article number 6388, 17 p. |
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| Erakunde egilea: | |
| Beste egile batzuk: | , , , , , , , |
| Gaia: | Title screen This treatise studies the thermal sensitivity of the mechanical and optical transmission coefficients of a microoptoelectromechanical (MOEM) accelerometer based on evanescent coupling in a temperature range from minus 40 to plus 125 °C. Two types of optical measuring transducers are considered: based on a directional coupler and a resonator. This analysis covers the optical and mechanical components of the thermal sensitivity of the transmission coefficient. In terms of the mechanical part, the temperature effect induces changes to the linear dimensions of the structure and material characteristics and causes internal mechanical stresses as well. The temperature effect on the optical system of the accelerometer is conditioned by the thermo-optic effect of the materials the optical waveguides are made of. This study includes experiments on the refraction index dependence on the temperature of the optical films that compose the optical system of the MOEM accelerometer. The experiment shows that the refraction index of the films grows with temperature and amounts to 0.12642 ppm/°C for silicon nitride on the SiO2/Si substrate. For the optical measuring transducer based on a directional coupler, the thermal sensitivity of the accelerometer’s optical transmission coefficient is 580 ppm/°C. For the resonator-based transducer, the thermal sensitivity is 0.33 °C−1. The thermal sensitivity of the normalized mechanical transmission coefficient of the accelerometer is 120 ppm/°C. For optical measuring transducers based on a directional coupler, the contribution of the temperature dependent refraction index alteration to the overall error is 5 times larger than that of the MOEM accelerometer’s mechanical parameters, while for the resonator-based transducer the difference reaches 3000 times. This means its operability is only possible in a thermostatic environment Текстовый файл |
| Hizkuntza: | ingelesa |
| Argitaratua: |
2025
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| Gaiak: | |
| Sarrera elektronikoa: | https://doi.org/10.3390/s25206388 |
| Formatua: | Baliabide elektronikoa Liburu kapitulua |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=687766 |
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| 200 | 1 | |a Thermal Sensitivity of a Microoptoelectromechanical Evanescent-Coupling-Based Accelerometer |f E. Barbin, I. Kulinich, T. Nesterenko [et al.] | |
| 203 | |a Текст |b визуальный |c электронный | ||
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| 330 | |a This treatise studies the thermal sensitivity of the mechanical and optical transmission coefficients of a microoptoelectromechanical (MOEM) accelerometer based on evanescent coupling in a temperature range from minus 40 to plus 125 °C. Two types of optical measuring transducers are considered: based on a directional coupler and a resonator. This analysis covers the optical and mechanical components of the thermal sensitivity of the transmission coefficient. In terms of the mechanical part, the temperature effect induces changes to the linear dimensions of the structure and material characteristics and causes internal mechanical stresses as well. The temperature effect on the optical system of the accelerometer is conditioned by the thermo-optic effect of the materials the optical waveguides are made of. This study includes experiments on the refraction index dependence on the temperature of the optical films that compose the optical system of the MOEM accelerometer. The experiment shows that the refraction index of the films grows with temperature and amounts to 0.12642 ppm/°C for silicon nitride on the SiO2/Si substrate. For the optical measuring transducer based on a directional coupler, the thermal sensitivity of the accelerometer’s optical transmission coefficient is 580 ppm/°C. For the resonator-based transducer, the thermal sensitivity is 0.33 °C−1. The thermal sensitivity of the normalized mechanical transmission coefficient of the accelerometer is 120 ppm/°C. For optical measuring transducers based on a directional coupler, the contribution of the temperature dependent refraction index alteration to the overall error is 5 times larger than that of the MOEM accelerometer’s mechanical parameters, while for the resonator-based transducer the difference reaches 3000 times. This means its operability is only possible in a thermostatic environment | ||
| 336 | |a Текстовый файл | ||
| 461 | 1 | |t Sensors |c Basel |n MDPI AG | |
| 463 | 1 | |t Vol. 25, iss. 20 |v Article number 6388, 17 p. |d 2025 | |
| 610 | 1 | |a accelerometer | |
| 610 | 1 | |a optical transducer | |
| 610 | 1 | |a waveguide | |
| 610 | 1 | |a directional coupler | |
| 610 | 1 | |a coupling length | |
| 610 | 1 | |a temperature sensitivity | |
| 610 | 1 | |a transmission coefficient | |
| 610 | 1 | |a coefficient of thermal expansion | |
| 610 | 1 | |a refraction index | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 701 | 1 | |a Barbin |b E. S. |c specialist in the field of instrument engineering |c engineer of Tomsk Polytechnic University |f 1988- |g Evgeny Sergeevich |9 19519 | |
| 701 | 1 | |a Kulinich |b I. |g Ivan | |
| 701 | 1 | |a Nesterenko |b T. G. |c Fachmann auf dem Gebiet des Maschinenbaues |c Dozent der Polytechnischen Universität Tomsk, Kandidat der technischen Wissenschaften |f 1946- |g Tamara Georgijewna |9 15262 | |
| 701 | 1 | |a Koleda |b A. N. |c Fachmann auf dem Gebiet des Gerätebaues |c Ingenieur der Polytechnischen Universitat Tomsk |f 1985- |g Alexej Nikolajevistch |9 17032 | |
| 701 | 1 | |a Myrzakhmetov |b A. S. |g Ayan Sayatovich | |
| 701 | 1 | |a Mokhovikov |b D. M. |g Denis Maksimovich | |
| 701 | 1 | |a Vtorushin |b S. E. |g Sergey Evgenjevich | |
| 701 | 1 | |a Talovskaya |b A. A. |g Alena Alekseevna | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа неразрушающего контроля и безопасности |c (2017- ) |9 28322 |4 570 |
| 801 | 0 | |a RU |b 63413507 |c 20260811 | |
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