APA (7th ed.) Citation

Bolbasov E. N. Evgeny Nikolaevich, Buznik V. M. Vyacheslav Mikhaylovich, Varlamov D. A. Denis Aleksandrovich, Vorobjev A. O. Aleksandr Olegovich, Dubinenko G. E. Gleb Evgenjevich, Eremchuk A. I. Anatoly Ivanovich, & Trusova M. E. Marina Evgenievna. (2025). Domestic Fluoropolymer Products for Microelectronic Manufacturing: A Review; Russian Microelectronics; Vol. 54, iss. 6. 2025. https://doi.org/10.1134/S106373972560075X

Chicago Style (17th ed.) Citation

Bolbasov E. N. Evgeny Nikolaevich, Buznik V. M. Vyacheslav Mikhaylovich, Varlamov D. A. Denis Aleksandrovich, Vorobjev A. O. Aleksandr Olegovich, Dubinenko G. E. Gleb Evgenjevich, Eremchuk A. I. Anatoly Ivanovich, and Trusova M. E. Marina Evgenievna. Domestic Fluoropolymer Products for Microelectronic Manufacturing: A Review; Russian Microelectronics; Vol. 54, Iss. 6. 2025, 2025. https://doi.org/10.1134/S106373972560075X.

MLA (9th ed.) Citation

Bolbasov E. N. Evgeny Nikolaevich, et al. Domestic Fluoropolymer Products for Microelectronic Manufacturing: A Review; Russian Microelectronics; Vol. 54, Iss. 6. 2025, 2025. https://doi.org/10.1134/S106373972560075X.