Ivanova A. I. Anna Ivanovna, Bleykher G. A. Galina Alekseevna, & Zaytsev Daniil Dmitrievich D. D. (2025). Numerical Modeling of Thermal Processes and the Effect of Heating of Near-Surface Silicon Layers on the Titanium Accumulation and Diffusion during High-Intensity Pulsed Ion Implantation; Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques; Vol. 19, iss. 4. 2025. https://doi.org/10.1134/S1027451025701277
Chicago Style (17th ed.) CitationIvanova A. I. Anna Ivanovna, Bleykher G. A. Galina Alekseevna, and Zaytsev Daniil Dmitrievich D. D. Numerical Modeling of Thermal Processes and the Effect of Heating of Near-Surface Silicon Layers on the Titanium Accumulation and Diffusion During High-Intensity Pulsed Ion Implantation; Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques; Vol. 19, Iss. 4. 2025, 2025. https://doi.org/10.1134/S1027451025701277.
MLA (9th ed.) CitationIvanova A. I. Anna Ivanovna, et al. Numerical Modeling of Thermal Processes and the Effect of Heating of Near-Surface Silicon Layers on the Titanium Accumulation and Diffusion During High-Intensity Pulsed Ion Implantation; Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques; Vol. 19, Iss. 4. 2025, 2025. https://doi.org/10.1134/S1027451025701277.