Sidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, & Bleykher G. A. Galina Alekseevna. (2026). Reactive magnetron sputtering of copper oxide coatings using the metallic mode assisted by RF-ICP source: Experiment and calculation; Journal of Vacuum Science and Technology A; Vol. 44, iss. 1. 2026. https://doi.org/10.1116/6.0004926
Chicago (17e ed.) BronvermeldingSidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, en Bleykher G. A. Galina Alekseevna. Reactive Magnetron Sputtering of Copper Oxide Coatings Using the Metallic Mode Assisted by RF-ICP Source: Experiment and Calculation; Journal of Vacuum Science and Technology A; Vol. 44, Iss. 1. 2026, 2026. https://doi.org/10.1116/6.0004926.
MLA (9e ed.) BronvermeldingSidelev D. V. Dmitry Vladimirovich, et al. Reactive Magnetron Sputtering of Copper Oxide Coatings Using the Metallic Mode Assisted by RF-ICP Source: Experiment and Calculation; Journal of Vacuum Science and Technology A; Vol. 44, Iss. 1. 2026, 2026. https://doi.org/10.1116/6.0004926.