Sidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, & Bleykher G. A. Galina Alekseevna. (2026). Reactive magnetron sputtering of copper oxide coatings using the metallic mode assisted by RF-ICP source: Experiment and calculation. 2026. https://doi.org/10.1116/6.0004926
Citação do estilo Chicago (17ª ed.)Sidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, e Bleykher G. A. Galina Alekseevna. Reactive Magnetron Sputtering of Copper Oxide Coatings Using the Metallic Mode Assisted by RF-ICP Source: Experiment and Calculation. 2026, 2026. https://doi.org/10.1116/6.0004926.
Citação MLA (9ª ed.)Sidelev D. V. Dmitry Vladimirovich, et al. Reactive Magnetron Sputtering of Copper Oxide Coatings Using the Metallic Mode Assisted by RF-ICP Source: Experiment and Calculation. 2026, 2026. https://doi.org/10.1116/6.0004926.