Evdokimov K. E. Kirill Evgenievich, Konishchev M. E. Maksim Evgenievich, Zhi Lei Sun, Avdeeva D. K. Diana Konstantinovna, & Tverdokhlebov S. I. Sergei Ivanovich. (2022). Modeling and Experimental Study of Hysteresis during the Reactive Sputter Deposition of Titanium Oxides and Nitrides Using a Pulsed DC Magnetron; Materials Science Forum; Vol. 1065. 2022. https://doi.org/10.4028/p-nu5t9z
Chicago Style (17th ed.) CitationEvdokimov K. E. Kirill Evgenievich, Konishchev M. E. Maksim Evgenievich, Zhi Lei Sun, Avdeeva D. K. Diana Konstantinovna, and Tverdokhlebov S. I. Sergei Ivanovich. Modeling and Experimental Study of Hysteresis During the Reactive Sputter Deposition of Titanium Oxides and Nitrides Using a Pulsed DC Magnetron; Materials Science Forum; Vol. 1065. 2022, 2022. https://doi.org/10.4028/p-nu5t9z.
MLA (9th ed.) CitationEvdokimov K. E. Kirill Evgenievich, et al. Modeling and Experimental Study of Hysteresis During the Reactive Sputter Deposition of Titanium Oxides and Nitrides Using a Pulsed DC Magnetron; Materials Science Forum; Vol. 1065. 2022, 2022. https://doi.org/10.4028/p-nu5t9z.