Sidelev D. V. Dmitry Vladimirovich & Voronina E. D. Ekaterina Dmitrievna. (2023). Magnetron Deposition of Oxide Films in the Metallic Mode Enhanced by Radio-Frequency Inductively Coupled Plasma Source; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 17, iss. 5. 2023. https://doi.org/10.1134/S1027451023050166
Chicago Style (17th ed.) CitationSidelev D. V. Dmitry Vladimirovich and Voronina E. D. Ekaterina Dmitrievna. Magnetron Deposition of Oxide Films in the Metallic Mode Enhanced by Radio-Frequency Inductively Coupled Plasma Source; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 17, Iss. 5. 2023, 2023. https://doi.org/10.1134/S1027451023050166.
MLA (9th ed.) CitationSidelev D. V. Dmitry Vladimirovich and Voronina E. D. Ekaterina Dmitrievna. Magnetron Deposition of Oxide Films in the Metallic Mode Enhanced by Radio-Frequency Inductively Coupled Plasma Source; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 17, Iss. 5. 2023, 2023. https://doi.org/10.1134/S1027451023050166.