Cita APA

Sidelev D. V. Dmitry Vladimirovich & Voronina E. D. Ekaterina Dmitrievna. (2023). Magnetron Deposition of Oxide Films in the Metallic Mode Enhanced by Radio-Frequency Inductively Coupled Plasma Source. 2023. https://doi.org/10.1134/S1027451023050166

Citación estilo Chicago

Sidelev D. V. Dmitry Vladimirovich and Voronina E. D. Ekaterina Dmitrievna. Magnetron Deposition of Oxide Films in the Metallic Mode Enhanced by Radio-Frequency Inductively Coupled Plasma Source. 2023, 2023. https://doi.org/10.1134/S1027451023050166.

Cita MLA

Sidelev D. V. Dmitry Vladimirovich and Voronina E. D. Ekaterina Dmitrievna. Magnetron Deposition of Oxide Films in the Metallic Mode Enhanced by Radio-Frequency Inductively Coupled Plasma Source. 2023, 2023. https://doi.org/10.1134/S1027451023050166.