Barbin E. S. Evgeny Sergeevich, Kulinich I. V. Ivan Vladimirovich, Nesterenko T. G. Tamara Georgievna, Koleda A. N. Aleksey Nikolaevich, Shesterikov E. V. Evgeny Viktorovich, Baranov P. F. Pavel Fedorovich, & Ilyashchenko D. P. Dmitry Pavlovich. (2024). Wafer-Level Packaging of Microelectromechanical Systems Based on Frame Structure. 2024. https://doi.org/10.21122/2220-9506-2024-15-4-323-333
Chicago (17e ed.) BronvermeldingBarbin E. S. Evgeny Sergeevich, Kulinich I. V. Ivan Vladimirovich, Nesterenko T. G. Tamara Georgievna, Koleda A. N. Aleksey Nikolaevich, Shesterikov E. V. Evgeny Viktorovich, Baranov P. F. Pavel Fedorovich, en Ilyashchenko D. P. Dmitry Pavlovich. Wafer-Level Packaging of Microelectromechanical Systems Based on Frame Structure. 2024, 2024. https://doi.org/10.21122/2220-9506-2024-15-4-323-333.
MLA (9e ed.) BronvermeldingBarbin E. S. Evgeny Sergeevich, et al. Wafer-Level Packaging of Microelectromechanical Systems Based on Frame Structure. 2024, 2024. https://doi.org/10.21122/2220-9506-2024-15-4-323-333.