Сравнительный анализ особенностей формирования состава плазмы при магнетронном распылении карбида кремния с использованием охлаждаемой и горячей мишеней

Сравнительный анализ особенностей формирования состава плазмы при магнетронном распылении карбида кремния с использованием охлаждаемой и горячей мишеней

Detalles Bibliográficos
Parent link:	Перспективы развития фундаментальных наук=Prospects of Fundamental Sciences Development: сборник научных трудов XХII Международной конференции студентов, аспирантов и молодых ученых, г. Томск, 22-25 апреля 2025/ Национальный исследовательский Томский политехнический университет ; под ред. И. А. Курзиной [и др.].— .— Томск: Изд-во ТПУ Т. 1 : Физика.— 2025.— С. 263-265
Autor Principal:	Фишер М. Э.
Outros autores:	Грудинин В. А. Владислав Алексеевич (727)
Summary:	Заглавие с экрана In this work the influence of the target type on the peculiarities of plasma composition formation during magnetron sputtering of silicon carbide is considered. The plasma composition was determined by optical emission spectroscopy. It is revealed that at magnetron sputtering of hot target the intensity of plasma components increases Текстовый файл
Idioma:	ruso
Publicado:	2025
Subjects:	труды учёных ТПУ электронный ресурс silicon carbide magnetron sputtering OES-analysis
Acceso en liña:	http://earchive.tpu.ru/handle/11683/132865
Formato:	Electrónico Capítulo de libro
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=682463

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