Ivanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Gurulev A. V. Aleksandr Valerjevich, Varlachev V. A. Valery Aleksandrovich, Efimov D. D. Dmitry Davidovich, & Chernyshev A. A. (2024). Investigation of High-Intensity Implantation of Titanium Ions into Silicon under Conditions of Beam Energy Impact on the Surface; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 18, iss. 5. 2024. https://doi.org/10.1134/S1027451024701040
Chicago Style (17th ed.) CitationIvanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Gurulev A. V. Aleksandr Valerjevich, Varlachev V. A. Valery Aleksandrovich, Efimov D. D. Dmitry Davidovich, and Chernyshev A. A. Investigation of High-Intensity Implantation of Titanium Ions into Silicon Under Conditions of Beam Energy Impact on the Surface; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 18, Iss. 5. 2024, 2024. https://doi.org/10.1134/S1027451024701040.
MLA citiranjeIvanova A. I. Anna Ivanovna, et al. Investigation of High-Intensity Implantation of Titanium Ions into Silicon Under Conditions of Beam Energy Impact on the Surface; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 18, Iss. 5. 2024, 2024. https://doi.org/10.1134/S1027451024701040.