Ivanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Gurulev A. V. Aleksandr Valerjevich, Varlachev V. A. Valery Aleksandrovich, Efimov D. D. Dmitry Davidovich, & Chernyshev A. A. (2024). Investigation of High-Intensity Implantation of Titanium Ions into Silicon under Conditions of Beam Energy Impact on the Surface; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 18, iss. 5. 2024. https://doi.org/10.1134/S1027451024701040
Chicago (17e ed.) BronvermeldingIvanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Gurulev A. V. Aleksandr Valerjevich, Varlachev V. A. Valery Aleksandrovich, Efimov D. D. Dmitry Davidovich, en Chernyshev A. A. Investigation of High-Intensity Implantation of Titanium Ions into Silicon Under Conditions of Beam Energy Impact on the Surface; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 18, Iss. 5. 2024, 2024. https://doi.org/10.1134/S1027451024701040.
MLA (9e ed.) BronvermeldingIvanova A. I. Anna Ivanovna, et al. Investigation of High-Intensity Implantation of Titanium Ions into Silicon Under Conditions of Beam Energy Impact on the Surface; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 18, Iss. 5. 2024, 2024. https://doi.org/10.1134/S1027451024701040.