Ivanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Gurulev A. V. Aleksandr Valerjevich, Varlachev V. A. Valery Aleksandrovich, Efimov D. D. Dmitry Davidovich, & Chernyshev A. A. (2024). Investigation of High-Intensity Implantation of Titanium Ions into Silicon under Conditions of Beam Energy Impact on the Surface. 2024. https://doi.org/10.1134/S1027451024701040
Cita Chicago (17th ed.)Ivanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Gurulev A. V. Aleksandr Valerjevich, Varlachev V. A. Valery Aleksandrovich, Efimov D. D. Dmitry Davidovich, i Chernyshev A. A. Investigation of High-Intensity Implantation of Titanium Ions into Silicon Under Conditions of Beam Energy Impact on the Surface. 2024, 2024. https://doi.org/10.1134/S1027451024701040.
Cita MLA (9th ed.)Ivanova A. I. Anna Ivanovna, et al. Investigation of High-Intensity Implantation of Titanium Ions into Silicon Under Conditions of Beam Energy Impact on the Surface. 2024, 2024. https://doi.org/10.1134/S1027451024701040.