Integration of Carbon Nanotubes in an HFCVD Diamond Synthesis Process in a Methane-Rich H2/CH4 Gas Mixture; Materials; Vol. 16, iss. 20

Integration of Carbon Nanotubes in an HFCVD Diamond Synthesis Process in a Methane-Rich H2/CH4 Gas Mixture; Materials; Vol. 16, iss. 20

Bibliographic Details
Parent link:Materials.— .— Basel: MDPI AG
Vol. 16, iss. 20.— 2023.— Article number 6755, 12 p.
Other Authors: Mitulinsky A. S. Aleksandr Sergeevich, Gaydaychuk A. V. Alexander Valerievich, Zenkin S. P. Sergey Petrovich, Meysner S. N. Stanislav Nikolaevich, Bulakh V. A. Vlada Aleksandrovna, Linnik S. A. Stepan Andreevich
Summary:Title screen
In this work, we present experimental data on carbon nanotubes integration during diamond synthesis. Carbon nanotubes layers were preliminarily deposited on silicon and diamond substrates, after which the substrates were loaded into the HFCVD reactor for further growth of the diamond phase. The CVD process was held in an argon-free H2/CH4 working gas mixture without the use of a catalyst for carbon nanotubes growth. It is shown that in a wide range of studied working gas composition (CH4 concentration up to 28.6 vol.%) nanotubes etched from the substrate surface before the diamond growth process began
Текстовый файл
Language:English
Published: 2023
Subjects:
электронный ресурс
труды учёных ТПУ
HFCVD
carbon nanotubes
hydrogen etching
Online Access:http://earchive.tpu.ru/handle/11683/132513
https://doi.org/10.3390/ma16206755
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=680249

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