Ivanova A. I. Anna Ivanovna, Bleykher G. A. Galina Alekseevna, Vakhrushev D. O. Dimitry Olegovich, & Korneva O. S. Olga Sergeevna. (2023). Numerical Simulation of Temperature Field Dynamics in Single-Crystal Silicon at Repetitively-Pulsed High-Intensity Ion Implantation and Energy Impact on the Surface Layer. 2023. https://doi.org/10.1007/s11182-023-02843-1
Chicago Style (17th ed.) CitationIvanova A. I. Anna Ivanovna, Bleykher G. A. Galina Alekseevna, Vakhrushev D. O. Dimitry Olegovich, and Korneva O. S. Olga Sergeevna. Numerical Simulation of Temperature Field Dynamics in Single-Crystal Silicon at Repetitively-Pulsed High-Intensity Ion Implantation and Energy Impact on the Surface Layer. 2023, 2023. https://doi.org/10.1007/s11182-023-02843-1.
MLA (9th ed.) CitationIvanova A. I. Anna Ivanovna, et al. Numerical Simulation of Temperature Field Dynamics in Single-Crystal Silicon at Repetitively-Pulsed High-Intensity Ion Implantation and Energy Impact on the Surface Layer. 2023, 2023. https://doi.org/10.1007/s11182-023-02843-1.