National Research Tomsk Polytechnic University, Gurulev A. V. Aleksandr Valerjevich, Ivanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Efimov D. D. Dmitry Davidovich, & Chernyshev A. A. Artem Alekseevich. (2024). Modification of silicon under synergy of high-intensity implantation of titanium ions and energy influence of a high-power ion beam on a surface; Materials. Technologies. Design; Т. 6, № 1. 2024.
Chicagoスタイル(17版)引用形式National Research Tomsk Polytechnic University, Gurulev A. V. Aleksandr Valerjevich, Ivanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Efimov D. D. Dmitry Davidovich, , Chernyshev A. A. Artem Alekseevich. Modification of Silicon Under Synergy of High-intensity Implantation of Titanium Ions and Energy Influence of a High-power Ion Beam on a Surface; Materials. Technologies. Design; Т. 6, № 1. 2024, 2024.
MLA(9版)引用形式National Research Tomsk Polytechnic University, et al. Modification of Silicon Under Synergy of High-intensity Implantation of Titanium Ions and Energy Influence of a High-power Ion Beam on a Surface; Materials. Technologies. Design; Т. 6, № 1. 2024, 2024.