Томский политехнический университет, Gurulev A. V. Aleksandr Valerjevich, Ivanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Efimov D. D. Dmitry Davidovich, & Chernyshev A. A. Artem Alekseevich. (2024). Modification of silicon under synergy of high-intensity implantation of titanium ions and energy influence of a high-power ion beam on a surface; Materials. Technologies. Design; Т. 6, № 1. 2024.
Cita Chicago Style (17a ed.)Томский политехнический университет, Gurulev A. V. Aleksandr Valerjevich, Ivanova A. I. Anna Ivanovna, Vakhrushev D. O. Dimitry Olegovich, Korneva O. S. Olga Sergeevna, Efimov D. D. Dmitry Davidovich, y Chernyshev A. A. Artem Alekseevich. Modification of Silicon Under Synergy of High-intensity Implantation of Titanium Ions and Energy Influence of a High-power Ion Beam on a Surface; Materials. Technologies. Design; Т. 6, № 1. 2024, 2024.
Cita MLA (9a ed.)Томский политехнический университет, et al. Modification of Silicon Under Synergy of High-intensity Implantation of Titanium Ions and Energy Influence of a High-power Ion Beam on a Surface; Materials. Technologies. Design; Т. 6, № 1. 2024, 2024.