Reactive magnetron deposition of YAG:Ce phosphor coatings in the metallic mode; Optical Materials; Vol. 156
| Parent link: | Optical Materials.— .— Amsterdam: Elsevier Science Publishing Company Inc. Vol. 156.— 2024.— Article number 115946, 8 p. |
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| Altri autori: | , , , |
| Riassunto: | Title screen The possibility of YAG:Ce3+ coatings phosphor formation by reactive magnetron deposition during sputtering of metal targets in an atmosphere of argon and oxygen activated by a radio-frequency source of inductively coupled plasma has been studied. The installation consists of three middle-frequency magnetrons with Y, Al and Ce targets with power of 1000, 1570 and 150 W, respectively. The (Y–Al–O):Ce coatings were deposited in metal and oxide sputtering modes of yttrium and aluminium targets. The coating deposition rate on the planetary rotating substrates in the metallic sputtering mode reaches of 0.67 nm/s. This is about an order of magnitude higher compared to the oxide sputtering mode and the method of radio-frequency magnetron sputtering of ceramic targets commonly used to deposit such coatings. Characterization of the elemental and phase composition of the coatings showed the YAG:Ce crystal structure formation during annealing both in air at 1100 °C and in a nitrogen atmosphere at 1200 °C. Cathodo- and photoluminescent spectroscopy was used for study of YAG:Ce thin films emission properties. The emission properties of YAG:Ce correspond to the radiation transition in Ce3+ ions. It was found that the intensity of both types of luminescence turned out to be slightly higher for samples annealed in air. It enhanced with increasing coating thickness in the considered range from 1.8 to 7.0 μm. The suggested approach could be potentially used for luminescent coatings formation with high level of the emission properties. AM_Agreement |
| Lingua: | inglese |
| Pubblicazione: |
2024
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| Soggetti: | |
| Accesso online: | https://doi.org/10.1016/j.optmat.2024.115946 |
| Natura: | MixedMaterials Elettronico Capitolo di libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=674995 |
MARC
| LEADER | 00000naa0a2200000 4500 | ||
|---|---|---|---|
| 001 | 674995 | ||
| 005 | 20240927112800.0 | ||
| 090 | |a 674995 | ||
| 100 | |a 20240927d2024 k||y0rusy50 ba | ||
| 101 | 0 | |a eng | |
| 102 | |a NL | ||
| 135 | |a drcn ---uucaa | ||
| 181 | 0 | |a i |b e | |
| 182 | 0 | |a b | |
| 183 | 0 | |a cr |2 RDAcarrier | |
| 200 | 1 | |a Reactive magnetron deposition of YAG:Ce phosphor coatings in the metallic mode |f A. Runts, G. Bleykher, S. Stepanov, D. Valiev | |
| 203 | |a Текст |c электронный |b визуальный | ||
| 283 | |a online_resource |2 RDAcarrier | ||
| 300 | |a Title screen | ||
| 320 | |a References: 36 tit. | ||
| 330 | |a The possibility of YAG:Ce3+ coatings phosphor formation by reactive magnetron deposition during sputtering of metal targets in an atmosphere of argon and oxygen activated by a radio-frequency source of inductively coupled plasma has been studied. The installation consists of three middle-frequency magnetrons with Y, Al and Ce targets with power of 1000, 1570 and 150 W, respectively. The (Y–Al–O):Ce coatings were deposited in metal and oxide sputtering modes of yttrium and aluminium targets. The coating deposition rate on the planetary rotating substrates in the metallic sputtering mode reaches of 0.67 nm/s. This is about an order of magnitude higher compared to the oxide sputtering mode and the method of radio-frequency magnetron sputtering of ceramic targets commonly used to deposit such coatings. Characterization of the elemental and phase composition of the coatings showed the YAG:Ce crystal structure formation during annealing both in air at 1100 °C and in a nitrogen atmosphere at 1200 °C. Cathodo- and photoluminescent spectroscopy was used for study of YAG:Ce thin films emission properties. The emission properties of YAG:Ce correspond to the radiation transition in Ce3+ ions. It was found that the intensity of both types of luminescence turned out to be slightly higher for samples annealed in air. It enhanced with increasing coating thickness in the considered range from 1.8 to 7.0 μm. The suggested approach could be potentially used for luminescent coatings formation with high level of the emission properties. | ||
| 371 | 0 | |a AM_Agreement | |
| 461 | 1 | |t Optical Materials |n Elsevier Science Publishing Company Inc. |c Amsterdam | |
| 463 | 1 | |t Vol. 156 |v Article number 115946, 8 p. |d 2024 | |
| 610 | 1 | |a Magnetron sputtering | |
| 610 | 1 | |a Reactive magnetron deposition | |
| 610 | 1 | |a YAG:Ce3+ coatings | |
| 610 | 1 | |a Y3Al5O12:Ce thin films | |
| 610 | 1 | |a Luminescence | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 701 | 1 | |a Runts |b A. A. |g Artem Alekseevich | |
| 701 | 1 | |a Bleykher (Bleicher) |b G. A. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences |f 1961- |g Galina Alekseevna |9 15657 | |
| 701 | 1 | |a Stepanov |b S. A. |c specialist in the field of lightning engineering |c Engineer of Tomsk Polytechnic University |f 1986- |g Sergey Aleksandrovich |9 17369 | |
| 701 | 1 | |a Valiev |b D. T. |c specialist in the field of material science |c Associate Professor of Tomsk Polytechnic University, Candidate of Physical and Mathematical Sciences |f 1987- |g Damir Talgatovich |9 17370 | |
| 712 | 0 | 2 | |a National Research Tomsk Polytechnic University |9 27197 |4 570 |
| 801 | 2 | |a RU |b 63413507 |c 20240927 |g RCR | |
| 856 | 4 | |u https://doi.org/10.1016/j.optmat.2024.115946 |z https://doi.org/10.1016/j.optmat.2024.115946 | |
| 942 | |c CR | ||