Исследование процесса напыления DLC покрытий с помощью импульсно-дугового испарителя
| Parent link: | Перспективы развития фундаментальных наук=Prospects of Fundamental Sciences Development: сборник научных трудов XXI Международной конференции студентов, аспирантов и молодых ученых, г. Томск, 23-26 апреля 2024 г./ Национальный исследовательский Томский политехнический университет ; под ред. И. А. Курзиной [и др.].— .— Томск: Изд-во ТПУ Т. 1 : Физика.— 2024.— С. 112-114 |
|---|---|
| 1. Verfasser: | |
| Körperschaft: | |
| Weitere Verfasser: | |
| Zusammenfassung: | Заглавие с экрана The article discusses the process of applying a DLC coating using a pulsed arc evaporator, as well as the effect of the electrical characteristics of the pulsed arc on the properties of the resulting DLC coatings. It is shown that, with an increase in the storage voltage, the current strength increases. However, the pulse frequency has little effect on the current strength and shape of the graph. After a series of depositions of DLC coatings under different operating conditions, it was found that a coating obtained at 200V storage voltage and 2Hz pulse frequency had greater hardness and flexibility, respectively: 68.8 ± 8.1GPa and 511 ± 66GPa Текстовый файл |
| Sprache: | Russisch |
| Veröffentlicht: |
2024
|
| Schlagworte: | |
| Online-Zugang: | http://earchive.tpu.ru/handle/11683/80560 |
| Format: | Elektronisch Buchkapitel |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=674399 |
| Zusammenfassung: | Заглавие с экрана The article discusses the process of applying a DLC coating using a pulsed arc evaporator, as well as the effect of the electrical characteristics of the pulsed arc on the properties of the resulting DLC coatings. It is shown that, with an increase in the storage voltage, the current strength increases. However, the pulse frequency has little effect on the current strength and shape of the graph. After a series of depositions of DLC coatings under different operating conditions, it was found that a coating obtained at 200V storage voltage and 2Hz pulse frequency had greater hardness and flexibility, respectively: 68.8 ± 8.1GPa and 511 ± 66GPa Текстовый файл |
|---|