National Research Tomsk Polytechnic University, Xi Bangwen, Xiong Gang, Kozin K. A. Kirill Andreevich, He Chang, Tamir T. S. Tariku Sinshaw, . . . Shen Zhen. (2023). Modeling and random search optimization for the polysilicon CVD reactor; Results in Control and Optimization; Vol. 13. 2023. https://doi.org/10.1016/j.rico.2023.100320
Cita Chicago (17th ed.)National Research Tomsk Polytechnic University, Xi Bangwen, Xiong Gang, Kozin K. A. Kirill Andreevich, He Chang, Tamir T. S. Tariku Sinshaw, Song Yonggang, Liu Xiong, i Shen Zhen. Modeling and Random Search Optimization for the Polysilicon CVD Reactor; Results in Control and Optimization; Vol. 13. 2023, 2023. https://doi.org/10.1016/j.rico.2023.100320.
Cita MLA (9th ed.)National Research Tomsk Polytechnic University, et al. Modeling and Random Search Optimization for the Polysilicon CVD Reactor; Results in Control and Optimization; Vol. 13. 2023, 2023. https://doi.org/10.1016/j.rico.2023.100320.