APA (7th ed.) Citation

National Research Tomsk Polytechnic University, Grenadyorov A. S. Aleksandr Sergeevich, Zakharov A. N. Aleksandr Nikolaevich, Oskirko V. O. Vladimir Olegovich, Sidelev D. V. Dmitry Vladimirovich, Oskomov K. V. Konstantin Vladimirovich, & Solovjev A. A. Andrey Aleksandrovich. (2023). Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating. 2023. https://doi.org/10.1007/s11182-023-02837-z

Chicago Style (17th ed.) Citation

National Research Tomsk Polytechnic University, Grenadyorov A. S. Aleksandr Sergeevich, Zakharov A. N. Aleksandr Nikolaevich, Oskirko V. O. Vladimir Olegovich, Sidelev D. V. Dmitry Vladimirovich, Oskomov K. V. Konstantin Vladimirovich, and Solovjev A. A. Andrey Aleksandrovich. Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating. 2023, 2023. https://doi.org/10.1007/s11182-023-02837-z.

MLA (9th ed.) Citation

National Research Tomsk Polytechnic University, et al. Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating. 2023, 2023. https://doi.org/10.1007/s11182-023-02837-z.