National Research Tomsk Polytechnic University, Grenadyorov A. S. Aleksandr Sergeevich, Zakharov A. N. Aleksandr Nikolaevich, Oskirko V. O. Vladimir Olegovich, Sidelev D. V. Dmitry Vladimirovich, Oskomov K. V. Konstantin Vladimirovich, & Solovjev A. A. Andrey Aleksandrovich. (2023). Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating; Russian Physics Journal; № 11 - Vol. 65. 2023. https://doi.org/10.1007/s11182-023-02837-z
Цитирование в стиле Чикаго (17-е изд.)National Research Tomsk Polytechnic University, Grenadyorov A. S. Aleksandr Sergeevich, Zakharov A. N. Aleksandr Nikolaevich, Oskirko V. O. Vladimir Olegovich, Sidelev D. V. Dmitry Vladimirovich, Oskomov K. V. Konstantin Vladimirovich, и Solovjev A. A. Andrey Aleksandrovich. Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating; Russian Physics Journal; № 11 - Vol. 65. 2023, 2023. https://doi.org/10.1007/s11182-023-02837-z.
Цитирование MLA (9-е изд.)National Research Tomsk Polytechnic University, et al. Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating; Russian Physics Journal; № 11 - Vol. 65. 2023, 2023. https://doi.org/10.1007/s11182-023-02837-z.