APA (7th ed.) Citation

Томский политехнический университет, Grenadyorov A. S. Aleksandr Sergeevich, Zakharov A. N. Aleksandr Nikolaevich, Oskirko V. O. Vladimir Olegovich, Sidelev D. V. Dmitry Vladimirovich, Oskomov K. V. Konstantin Vladimirovich, & Solovjev A. A. Andrey Aleksandrovich. (2023). Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating; Russian Physics Journal; № 11 - Vol. 65. 2023. https://doi.org/10.1007/s11182-023-02837-z

Chicago Style (17th ed.) Citation

Томский политехнический университет, Grenadyorov A. S. Aleksandr Sergeevich, Zakharov A. N. Aleksandr Nikolaevich, Oskirko V. O. Vladimir Olegovich, Sidelev D. V. Dmitry Vladimirovich, Oskomov K. V. Konstantin Vladimirovich, and Solovjev A. A. Andrey Aleksandrovich. Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating; Russian Physics Journal; № 11 - Vol. 65. 2023, 2023. https://doi.org/10.1007/s11182-023-02837-z.

MLA (9th ed.) Citation

Томский политехнический университет, et al. Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating; Russian Physics Journal; № 11 - Vol. 65. 2023, 2023. https://doi.org/10.1007/s11182-023-02837-z.