The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer; Sensors; Vol. 24, iss. 3

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer; Sensors; Vol. 24, iss. 3

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Parent link:	Sensors.— .— Basel: MDPI AG Vol. 24, iss. 3.— 2024.— Article number 765, 21 p.
Tác giả của công ty:	Томский политехнический университет
Tác giả khác:	Barbin E. S. Evgeny Sergeevich, Nesterenko T. G. Tamara Georgijewna, Koleda A. N. Alexej Nikolajevistch, Shesterikov E. Evgeny, Kulinich I. Ivan, Kokolov A. Andrey, Perin A. Anton
Tóm tắt:	Title screen This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer’s microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 µg m/s2 at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements. The authors propose and experimentally test an optical transducer positioning system represented by a capacitive actuator. This approach allows avoiding the restrictions in the fabrication of the transducer conditioned by the extremely high aspect ratio of deep silicon etching (more than 100). The designed MOEMA is tested on three manufactured prototypes. The experiments show that the sensitivity threshold of the accelerometers is 2 µg. For the dynamic range from minus 0.01 g to plus 0.01 g, the average nonlinearity of the accelerometers’ characteristics ranges from 0.7% to 1.62%. For the maximum dynamic range from minus 0.015 g to plus 0.05 g, the nonlinearity ranges from 2.34% to 2.9%, having the maximum deviation at the edges of the regions. The power gain of the three prototypes of accelerometers varies from 12.321 mW/g to 26.472 mW/g. The results provide broad prospects for the application of the proposed solutions in integrated inertial devices Текстовый файл
Ngôn ngữ:	Tiếng Anh
Được phát hành:	2024
Những chủ đề:	электронный ресурс труды учёных ТПУ microoptoelectromechanical accelerometer tunneling effect evanescent coupling proof mass waveguides microoptoelectromechanical sensing element optical measuring transducer sensitivity threshold positioning system
Truy cập trực tuyến:	http://earchive.tpu.ru/handle/11683/132484 https://doi.org/10.3390/s24030765
Định dạng:	Điện tử Chương của sách
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=672566

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