The effect of Si content on microstructure and mechanical properties of Ti–Al–Ta–Si–N coatings; Vacuum; Vol. 216

The effect of Si content on microstructure and mechanical properties of Ti–Al–Ta–Si–N coatings; Vacuum; Vol. 216

Bibliographic Details
Parent link:Vacuum.— .— Amsterdam: Elsevier Science Publishing Company Inc.
Vol. 216.— 2023.— Article number 112422, 13 p.
Other Authors: Shugurov A. R. Artur Rubinovich, Kuzminov E. D. Evgeny Dmitrievich, Garanin Yu. Yury, Panin A. V. Alexey Viktorovich, Dmitriev A. I. Andrey Ivanovich
Summary:Title screen
The evolution of the microstructure and mechanical properties of magnetron-sputtered Ti 1-x-y-zAlxTaySizN coatings with increasing the Si content from z = 0 to 0.3 is studied. Based on the results of the X-ray photoelectron spectroscopy and X-ray diffraction investigations, it is shown that the nanocomposite structure consisting of Ti–Al–Ta–Si–N crystallites and the Si3N4 amorphous tissue phase is formed in the coatings at z = 0.1. The evolution of the coating microstructure with increasing the Si content from the pronounced columnar morphology to the featureless nanocomposite morphology is demonstrated using scanning electron microscopy and transmission electron microscopy. The formation of the amorphous tissue phase in the coatings with z ≥ 0.12 is clearly shown by high-resolution transmission electron microscopy investigations. Variations of the mechanical properties of the coatings with the Si content are studied by nanoindentation. The Ti0.36Al0.44Ta0.10Si0.10N coating is found to have a maximum hardness of 41 GPa coupled with the highest H/E* and H3/E*2 ratios
Текстовый файл
AM_Agreement
Language:English
Published: 2023
Subjects:
электронный ресурс
труды учёных ТПУ
transition metal nitride coatings
magnetron sputtering
microstructure
nanocomposite
mechanical properties
Online Access:https://doi.org/10.1016/j.vacuum.2023.112422
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=672201

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