The effect of Si content on microstructure and mechanical properties of Ti–Al–Ta–Si–N coatings

Bibliographic Details
Parent link:Vacuum.— .— Amsterdam: Elsevier Science Publishing Company Inc.
Vol. 216.— 2023.— Article number 112422, 13 p.
Other Authors: Shugurov A. R. Artur Rubinovich, Kuzminov E. D. Evgeny Dmitrievich, Garanin Yu. Yury, Panin A. V. Alexey Viktorovich, Dmitriev A. I. Andrey Ivanovich
Summary:Title screen
The evolution of the microstructure and mechanical properties of magnetron-sputtered Ti 1-x-y-zAlxTaySizN coatings with increasing the Si content from z = 0 to 0.3 is studied. Based on the results of the X-ray photoelectron spectroscopy and X-ray diffraction investigations, it is shown that the nanocomposite structure consisting of Ti–Al–Ta–Si–N crystallites and the Si3N4 amorphous tissue phase is formed in the coatings at z = 0.1. The evolution of the coating microstructure with increasing the Si content from the pronounced columnar morphology to the featureless nanocomposite morphology is demonstrated using scanning electron microscopy and transmission electron microscopy. The formation of the amorphous tissue phase in the coatings with z ≥ 0.12 is clearly shown by high-resolution transmission electron microscopy investigations. Variations of the mechanical properties of the coatings with the Si content are studied by nanoindentation. The Ti0.36Al0.44Ta0.10Si0.10N coating is found to have a maximum hardness of 41 GPa coupled with the highest H/E* and H3/E*2 ratios
Текстовый файл
AM_Agreement
Published: 2023
Subjects:
Online Access:https://doi.org/10.1016/j.vacuum.2023.112422
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=672201

MARC

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330 |a The evolution of the microstructure and mechanical properties of magnetron-sputtered Ti 1-x-y-zAlxTaySizN coatings with increasing the Si content from z = 0 to 0.3 is studied. Based on the results of the X-ray photoelectron spectroscopy and X-ray diffraction investigations, it is shown that the nanocomposite structure consisting of Ti–Al–Ta–Si–N crystallites and the Si3N4 amorphous tissue phase is formed in the coatings at z = 0.1. The evolution of the coating microstructure with increasing the Si content from the pronounced columnar morphology to the featureless nanocomposite morphology is demonstrated using scanning electron microscopy and transmission electron microscopy. The formation of the amorphous tissue phase in the coatings with z ≥ 0.12 is clearly shown by high-resolution transmission electron microscopy investigations. Variations of the mechanical properties of the coatings with the Si content are studied by nanoindentation. The Ti0.36Al0.44Ta0.10Si0.10N coating is found to have a maximum hardness of 41 GPa coupled with the highest H/E* and H3/E*2 ratios 
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461 1 |t Vacuum  |c Amsterdam  |n Elsevier Science Publishing Company Inc. 
463 1 |t Vol. 216  |v Article number 112422, 13 p.  |d 2023 
610 1 |a электронный ресурс 
610 1 |a труды учёных ТПУ 
610 1 |a transition metal nitride coatings 
610 1 |a magnetron sputtering 
610 1 |a microstructure 
610 1 |a nanocomposite 
610 1 |a mechanical properties 
701 1 |a Shugurov  |b A. R.  |c Specialist in the field of material science  |c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences  |f 1967-  |g Artur Rubinovich  |y Tomsk  |9 22641 
701 1 |a Kuzminov  |b E. D.  |g Evgeny Dmitrievich 
701 1 |a Garanin  |b Yu.  |g Yury 
701 1 |a Panin  |b A. V.  |c physicist  |c Professor of Tomsk Polytechnic University, doctor of physical and mathematical Sciences  |f 1971-  |g Alexey Viktorovich  |9 17992 
701 1 |a Dmitriev  |b A. I.  |c physicist  |c engineer of Tomsk Polytechnic University, doctor of physical and mathematical sciences  |f 1972-  |g Andrey Ivanovich  |9 18967 
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