Deposition of Superconducting Nb3Sn Coatings Using Multiple Magnetron Sputtering Techniques; Metals; Vol. 13 - iss. 10
| Parent link: | Metals.— .— Basel: MDPI AG Vol. 13 - iss. 10.— 2023.— Article number 1730, P. 1-12 |
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| Corporate Author: | |
| Other Authors: | , , , , |
| Summary: | This paper describes the elemental and phase composition, microstructure, and superconducting properties of Nb3Sn deposited by magnetron sputtering. The films were deposited on sapphire substrates using three different techniques: co-evaporation, layer-by-layer deposition of Nb and Sn, and sputtering of a stoichiometric Nb3Sn target. The influence of magnetron operation mode on the as-deposited film element composition is described. After high-temperature annealing at 700–900 ◦C, the results indicate the formation of superconductive films. The highest critical temperature of 16.9 K was obtained for the film deposited at a stoichiometric Nb3Sn target and annealed at a temperature of 800 ◦C for 12 h. These results could be used for superconducting radio-frequency applications.
Текстовый файл |
| Language: | English |
| Published: |
2023
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| Subjects: | |
| Online Access: | http://earchive.tpu.ru/handle/11683/132520 https://doi.org/10.3390/met13101730 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=671734 |
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| 200 | 1 | |a Deposition of Superconducting Nb3Sn Coatings Using Multiple Magnetron Sputtering Techniques |f Y. Yurjev, A. Savelev, A. Yurjeva [et al.] |d Нанесение сверхпроводящих покрытий Nb3Sn с использованием нескольких методов магнетронного распыления |z rus | |
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| 330 | |a This paper describes the elemental and phase composition, microstructure, and superconducting properties of Nb3Sn deposited by magnetron sputtering. The films were deposited on sapphire substrates using three different techniques: co-evaporation, layer-by-layer deposition of Nb and Sn, and sputtering of a stoichiometric Nb3Sn target. The influence of magnetron operation mode on the as-deposited film element composition is described. After high-temperature annealing at 700–900 ◦C, the results indicate the formation of superconductive films. The highest critical temperature of 16.9 K was obtained for the film deposited at a stoichiometric Nb3Sn target and annealed at a temperature of 800 ◦C for 12 h. These results could be used for superconducting radio-frequency applications. | ||
| 336 | |a Текстовый файл | ||
| 461 | 1 | |c Basel |n MDPI AG |t Metals | |
| 463 | 1 | |d 2023 |t Vol. 13 - iss. 10 |v Article number 1730, P. 1-12 | |
| 610 | 1 | |a magnetron sputtering | |
| 610 | 1 | |a superconductivity | |
| 610 | 1 | |a nb3sn | |
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| 701 | 1 | |a Kazimirov |b A. I. |g Artyom Igorevich | |
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