Deposition of Superconducting Nb3Sn Coatings Using Multiple Magnetron Sputtering Techniques
| Parent link: | Metals.— .— Basel: MDPI AG Vol. 13 - iss. 10.— 2023.— Article number 1730, P. 1-12 |
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| 団体著者: | |
| その他の著者: | , , , , |
| 要約: | This paper describes the elemental and phase composition, microstructure, and superconducting properties of Nb3Sn deposited by magnetron sputtering. The films were deposited on sapphire substrates using three different techniques: co-evaporation, layer-by-layer deposition of Nb and Sn, and sputtering of a stoichiometric Nb3Sn target. The influence of magnetron operation mode on the as-deposited film element composition is described. After high-temperature annealing at 700–900 ◦C, the results indicate the formation of superconductive films. The highest critical temperature of 16.9 K was obtained for the film deposited at a stoichiometric Nb3Sn target and annealed at a temperature of 800 ◦C for 12 h. These results could be used for superconducting radio-frequency applications.
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| 出版事項: |
2023
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| オンライン･アクセス: | http://earchive.tpu.ru/handle/11683/132520 https://doi.org/10.3390/met13101730 |
| フォーマット: | 電子媒体 図書の章 |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=671734 |
| 要約: | This paper describes the elemental and phase composition, microstructure, and superconducting properties of Nb3Sn deposited by magnetron sputtering. The films were deposited on sapphire substrates using three different techniques: co-evaporation, layer-by-layer deposition of Nb and Sn, and sputtering of a stoichiometric Nb3Sn target. The influence of magnetron operation mode on the as-deposited film element composition is described. After high-temperature annealing at 700–900 ◦C, the results indicate the formation of superconductive films. The highest critical temperature of 16.9 K was obtained for the film deposited at a stoichiometric Nb3Sn target and annealed at a temperature of 800 ◦C for 12 h. These results could be used for superconducting radio-frequency applications.
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| DOI: | 10.3390/met13101730 |