An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

Bibliografski detalji
Parent link:Micromachines
Vol. 14, iss. 4.— 2023.— [802, 22 p.]
Autor kompanije: Национальный исследовательский Томский политехнический университет Исследовательская школа химических и биомедицинских технологий
Daljnji autori: Barbin E. S. Evgeny Sergeevich, Nesterenko T. G. Tamara Georgievna, Koleda A. N. Aleksey Nikolaevich, Shesterikov E. V. Evgeny Viktorovich, Kulinich I. Ivan, Kokolov A. A. Andrey Aleksandrovich
Sažetak:Title screen
Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages-such as high sensitivity and immunity to electromagnetic noise-over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 103 m−1 for a coupling length of 44 μm and 30 × 103 m−1 for a coupling length of 15 μm. The schemes with changing overlapping areas possess moderate sensitivity (1.25 × 106 m−1). The highest sensitivity (above 6.25 × 106 m−1) belongs to the schemes with an altering gap between the waveguides.
Jezik:engleski
Izdano: 2023
Teme:
труды учёных ТПУ
электронный ресурс
MOEM-accelerometer
optical measuring transducer
inertial mass
movable and fixed waveguides
optical transmission coefficient
coupling length
threshold sensitivity
directional coupler
silicon-on-insulator (SOI)
акселерометры
оптические измерительные приборы
оптические преобразователи
инерционная масса
волноводы
пороговая чувствительность
Online pristup:http://earchive.tpu.ru/handle/11683/132558
https://doi.org/10.3390/mi14040802
Format: Elektronički Poglavlje knjige
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=669642

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