An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect
| Parent link: | Micromachines Vol. 14, iss. 4.— 2023.— [802, 22 p.] |
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| Korporativna značnica: | |
| Drugi avtorji: | , , , , , |
| Izvleček: | Title screen Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages-such as high sensitivity and immunity to electromagnetic noise-over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 103 m−1 for a coupling length of 44 μm and 30 × 103 m−1 for a coupling length of 15 μm. The schemes with changing overlapping areas possess moderate sensitivity (1.25 × 106 m−1). The highest sensitivity (above 6.25 × 106 m−1) belongs to the schemes with an altering gap between the waveguides. |
| Jezik: | angleščina |
| Izdano: |
2023
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| Teme: | |
| Online dostop: | http://earchive.tpu.ru/handle/11683/132558 https://doi.org/10.3390/mi14040802 |
| Format: | Elektronski Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=669642 |
MARC
| LEADER | 00000naa0a2200000 4500 | ||
|---|---|---|---|
| 001 | 669642 | ||
| 005 | 20250917155636.0 | ||
| 035 | |a (RuTPU)RU\TPU\network\40894 | ||
| 035 | |a RU\TPU\network\33278 | ||
| 090 | |a 669642 | ||
| 100 | |a 20230713d2023 k||y0rusy50 ba | ||
| 101 | 0 | |a eng | |
| 102 | |a CH | ||
| 135 | |a drcn ---uucaa | ||
| 181 | 0 | |a i | |
| 182 | 0 | |a b | |
| 200 | 1 | |a An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect |f E. S. Barbin, T. G. Nesterenko, A. N. Koleda [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 44 tit.] | ||
| 330 | |a Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages-such as high sensitivity and immunity to electromagnetic noise-over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 103 m−1 for a coupling length of 44 μm and 30 × 103 m−1 for a coupling length of 15 μm. The schemes with changing overlapping areas possess moderate sensitivity (1.25 × 106 m−1). The highest sensitivity (above 6.25 × 106 m−1) belongs to the schemes with an altering gap between the waveguides. | ||
| 461 | |t Micromachines | ||
| 463 | |t Vol. 14, iss. 4 |v [802, 22 p.] |d 2023 | ||
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a MOEM-accelerometer | |
| 610 | 1 | |a optical measuring transducer | |
| 610 | 1 | |a inertial mass | |
| 610 | 1 | |a movable and fixed waveguides | |
| 610 | 1 | |a optical transmission coefficient | |
| 610 | 1 | |a coupling length | |
| 610 | 1 | |a threshold sensitivity | |
| 610 | 1 | |a directional coupler | |
| 610 | 1 | |a silicon-on-insulator (SOI) | |
| 610 | 1 | |a акселерометры | |
| 610 | 1 | |a оптические измерительные приборы | |
| 610 | 1 | |a оптические преобразователи | |
| 610 | 1 | |a инерционная масса | |
| 610 | 1 | |a волноводы | |
| 610 | 1 | |a пороговая чувствительность | |
| 701 | 1 | |a Barbin |b E. S. |c specialist in the field of instrument engineering |c engineer of Tomsk Polytechnic University |f 1988- |g Evgeny Sergeevich |3 (RuTPU)RU\TPU\pers\36470 | |
| 701 | 1 | |a Nesterenko |b T. G. |c specialist in the field of mechanical engineering |c Associate Professor of Tomsk Polytechnic University, Candidate of technical sciences |f 1946- |g Tamara Georgievna |3 (RuTPU)RU\TPU\pers\30970 |9 15208 | |
| 701 | 1 | |a Koleda |b A. N. |c Specialist in the field of instrument making |c Engineer of Tomsk Polytechnic University |f 1985- |g Aleksey Nikolaevich |3 (RuTPU)RU\TPU\pers\33286 |9 17031 | |
| 701 | 1 | |a Shesterikov |b E. V. |c physicist |c leading engineer of Tomsk Polytechnic University |f 1979- |g Evgeny Viktorovich |3 (RuTPU)RU\TPU\pers\35793 | |
| 701 | 1 | |a Kulinich |b I. |g Ivan | |
| 701 | 1 | |a Kokolov |b A. A. |g Andrey Aleksandrovich | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Исследовательская школа химических и биомедицинских технологий |c (2017- ) |3 (RuTPU)RU\TPU\col\23537 |
| 801 | 2 | |a RU |b 63413507 |c 20230713 |g RCR | |
| 856 | 4 | 0 | |u http://earchive.tpu.ru/handle/11683/132558 |z http://earchive.tpu.ru/handle/11683/132558 |
| 856 | 4 | 0 | |u https://doi.org/10.3390/mi14040802 |
| 942 | |c CF | ||