Comparative analysis of working gas composition impact on diamond films microstructure

Comparative analysis of working gas composition impact on diamond films microstructure

Bibliographic Details
Parent link:Surfaces and Interfaces
Vol. 37.— 2023.— [102717, 7 p.]
Corporate Author: Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Научно-производственная лаборатория "Импульсно-пучковых, электроразрядных и плазменных технологий"
Other Authors: Gaydaychuk A. V. Alexander Valerievich, Linnik S. A. Stepan Andreevich, Mitulinsky A. S. Aleksandr Sergeevich, Zenkin S. P. Sergey Petrovich, Bulakh V. A. Vlada Aleksandrovna
Summary:Title screen
The paper report a diamond films with dendrite-like or nanofeathers structure. Such structures was synthesized both in CH4/H2 (12.2–19.3 vol.% CH4) and CH4/H2/N2 (7–18.5 vol.% N2) working gas mixture. The resulting diamond dendrites are composed of diamond crystallites of various sizes, as well as non-diamond carbon, with a height comparable to the film thickness and a lateral size does not exceed 200 nm (the minimum size of detected diamond crystallites is ? 5 nm). Such diamond structure seems cannot be classified to either conventionally nano- or ultrananocrystalline films. It is shown that nitrogen-rich diamond films have a larger size of both individual diamond crystallites and dendrites, as well as a higher level of residual stresses and roughness, compared to nitrogen-free diamond films. At the same time, nitrogen-free films have higher values of hardness and Young's modulus.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2023
Subjects:
электронный ресурс
труды учёных ТПУ
Online Access:https://doi.org/10.1016/j.surfin.2023.102717
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=669383

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