Comparative analysis of working gas composition impact on diamond films microstructure; Surfaces and Interfaces; Vol. 37
| Parent link: | Surfaces and Interfaces Vol. 37.— 2023.— [102717, 7 p.] |
|---|---|
| Ente Autore: | |
| Altri autori: | , , , , |
| Riassunto: | Title screen The paper report a diamond films with dendrite-like or nanofeathers structure. Such structures was synthesized both in CH4/H2 (12.2–19.3 vol.% CH4) and CH4/H2/N2 (7–18.5 vol.% N2) working gas mixture. The resulting diamond dendrites are composed of diamond crystallites of various sizes, as well as non-diamond carbon, with a height comparable to the film thickness and a lateral size does not exceed 200 nm (the minimum size of detected diamond crystallites is ? 5 nm). Such diamond structure seems cannot be classified to either conventionally nano- or ultrananocrystalline films. It is shown that nitrogen-rich diamond films have a larger size of both individual diamond crystallites and dendrites, as well as a higher level of residual stresses and roughness, compared to nitrogen-free diamond films. At the same time, nitrogen-free films have higher values of hardness and Young's modulus. Режим доступа: по договору с организацией-держателем ресурса |
| Lingua: | inglese |
| Pubblicazione: |
2023
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| Soggetti: | |
| Accesso online: | https://doi.org/10.1016/j.surfin.2023.102717 |
| Natura: | MixedMaterials Elettronico Capitolo di libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=669383 |
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| 200 | 1 | |a Comparative analysis of working gas composition impact on diamond films microstructure |f A. V. Gaydaychuk, S. A. Linnik, A. S. Mitulinsky [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 36 tit.] | ||
| 330 | |a The paper report a diamond films with dendrite-like or nanofeathers structure. Such structures was synthesized both in CH4/H2 (12.2–19.3 vol.% CH4) and CH4/H2/N2 (7–18.5 vol.% N2) working gas mixture. The resulting diamond dendrites are composed of diamond crystallites of various sizes, as well as non-diamond carbon, with a height comparable to the film thickness and a lateral size does not exceed 200 nm (the minimum size of detected diamond crystallites is ? 5 nm). Such diamond structure seems cannot be classified to either conventionally nano- or ultrananocrystalline films. It is shown that nitrogen-rich diamond films have a larger size of both individual diamond crystallites and dendrites, as well as a higher level of residual stresses and roughness, compared to nitrogen-free diamond films. At the same time, nitrogen-free films have higher values of hardness and Young's modulus. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Surfaces and Interfaces | ||
| 463 | |t Vol. 37 |v [102717, 7 p.] |d 2023 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 701 | 1 | |a Gaydaychuk |b A. V. |c physicist |c Postgraduate, Engineer - Researcher of Tomsk Polytechnic University |f 1984- |g Alexander Valerievich |3 (RuTPU)RU\TPU\pers\32876 |9 16724 | |
| 701 | 1 | |a Linnik |b S. A. |c physicist |c Engineer-Researcher of Tomsk Polytechnic University |f 1985- |g Stepan Andreevich |3 (RuTPU)RU\TPU\pers\32877 |9 16725 | |
| 701 | 1 | |a Mitulinsky |b A. S. |c electric power specialist |c technician of Tomsk Polytechnic University |f 1998- |g Aleksandr Sergeevich |3 (RuTPU)RU\TPU\pers\47113 | |
| 701 | 1 | |a Zenkin |b S. P. |c physicist |c Researcher of Tomsk Polytechnic University |f 1988- |g Sergey Petrovich |3 (RuTPU)RU\TPU\pers\41880 | |
| 701 | 1 | |a Bulakh |b V. A. |c chemist |c Technician of Tomsk Polytechnic University |f 2002- |g Vlada Aleksandrovna |3 (RuTPU)RU\TPU\pers\47560 | |
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