Combined HF+MW CVD Approach for the Growth of Polycrystalline Diamond Films with Reduced Bow

Combined HF+MW CVD Approach for the Growth of Polycrystalline Diamond Films with Reduced Bow

Bibliografiske detaljer
Parent link:	Coatings Vol. 13, iss. 2.— 2023.— [380, 10 p.]
Institution som forfatter:	Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов
Andre forfattere:	Sedov V. Vadim, Popovich A. Alexey, Linnik S. A. Stepan Andreevich, Martyanov A. Artem, Wei J. Junjun, Zenkin S. P. Sergey Petrovich, Zavedeev E. Evgeny, Savin S. Sergey, Gaydaychuk A. V. Alexander Valerievich, Li Ch. Chengming, Ralchenko V. Victor, Konov V. Vitaly
Summary:	Title screen A combination of two methods of chemical vapor deposition (CVD) of diamond films, microwave plasma–assisted (MW CVD) and hot filament (HF CVD), was used for the growth of 100 µm-thick polycrystalline diamond (PCD) layers on Si substrates. The bow of HF CVD and MW CVD films showed opposite convex\concave trends; thus, the combined material allowed reducing the overall bow by a factor of 2–3. Using MW CVD for the growth of the initial 25 µm-thick PCD layer allowed achieving much higher thermal conductivity of the combined 110 µm-thick film at 210 W/m?K in comparison to 130 W/m?K for the 93 µm-thick pure HF CVD film.
Udgivet:	2023
Fag:	электронный ресурс труды учёных ТПУ diamond thin film chemical vapor deposition microwave plasma thermal conductivity Raman spectroscopy алмаз тонкие пленки химическое осаждение микроволновая плазма теплопроводность рамановская спектроскопия
Online adgang:	http://earchive.tpu.ru/handle/11683/74890 https://doi.org/10.3390/coatings13020380
Format:	Electronisk Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=669256

Lignende værker

Laser monitor for imaging single crystal diamond growth in H2-CH4 microwave plasma
Udgivet: (2019)

Cu-Ir thin film alloy as a potential substrate for the heteroepitaxial diamond growth
Udgivet: (2022)

An Apparatus for Studying Phosphor Luminescence upon Excitation by Atomic–Molecular Beams
Udgivet: (2020)

Thermal stability of a-C:H:SiOx thin films in hydrogen atmosphere
Udgivet: (2019)

Periodic renucleation as an approach to improving the tribological properties of CVD diamond films
Udgivet: (2024)

Study of ceria thin films prepared via electrochemical deposition : Role of selected electrochemical parameters on growth kinetics
Udgivet: (2019)

The peculiarities of structural modificaions of CVD polycrystalline diamond coatings by heavy doping with boron
af: Okhotnikov V. V. Vitaly Vladimirovich
Udgivet: (2016)

Lubricious behavior in CVD diamond/iron friction system at 25-700 ˚C
af: Zenkin S. P. Sergey Petrovich
Udgivet: (2019)

Effective thermal properties of an aluminum matrix composite with coated diamond inhomogeneities
af: Anisimova M. A. Mariya Aleksandrovna
Udgivet: (2016)

Multiwavelength optical sensor based on a gradient photonic crystal with a hexagonal plasmonic array
Udgivet: (2020)

Chemical Enhancement vs Molecule-Substrate Geometry in Plasmon-Enhanced Spectroscopy
Udgivet: (2021)

Aluminum and copper nanostructures for surface-enhanced Raman spectroscopy: A one-to-one comparison to silver and gold
Udgivet: (2018)

Radio frequency bias enhanced nucleation of CVD diamond
Udgivet: (2022)

GaSe oxidation in air: from bulk to monolayers
Udgivet: (2017)

Non-invasive monitoring of red beet development
Udgivet: (2019)

A review of surface-enhanced Raman spectroscopy in pathological processes
Udgivet: (2021)

Highly selective deposition of CVD diamond on si wafers by using a combined technique of photolithography and ion etching
af: Okhotnikov V. V. Vitaly Vladimirovich
Udgivet: (2016)

Состав флюидных включений по КР-спектрам в палеозойских карбонатных породах северо-останинского месторождения, Западная Сибирь
af: Краснощёкова Л. А. Любовь Афанасьевна
Udgivet: (2019)

Highly Localized Strain in a MoS2/Au Heterostructure Revealed by Tip-Enhanced Raman Spectroscopy
Udgivet: (2017)

The dynamic sublayers for improving the adhesion of CVD diamond films on copper
af: Gaydaychuk A. V. Alexander Valerievich
Udgivet: (2016)

Solid particle erosion of CVD diamond films deposited at different methane concentration
Udgivet: (2022)

The Phase Composition and Structure of Silicon-Carbon Coatings
Udgivet: (2019)

Effect of substrate bias and substrate/plasma generator distance on properties of a-C:H:SiOx films synthesized by PACVD
Udgivet: (2019)

Deposition and Patterning of Polycrystalline Diamond Films Using Traditional Photolithography and Reactive Ion Etching
af: Linnik S. A. Stepan Andreevich
Udgivet: (2017)

RF Magnetron Sputtering of Substituted Hydroxyapatite for Deposition of Biocoatings
Udgivet: (2022)

Glancing angle intermediate layer deposition approach for CVD diamond coating of high-speed steel substrates
Udgivet: (2024)

Comparative study of monolithic, bilayer and gradient CVD diamond coatings under dry sliding against alumina
Udgivet: (2025)

Optimization of fluorine obtaining processing
af: Liventsova N. V. Nina Vladimirovna
Udgivet: (2007)

Handbook of the Physics of Thin-Film Solar Cells
af: Böer, Karl W.
Udgivet: (2013)

The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode
af: Linnik S. A. Stepan Andreevich
Udgivet: (2016)

Светодиод с CVD-алмазным теплоотводом
Udgivet: (2013)

Overview of the CMS beam loss monitoring system (BCML) and diamond detectors surface modification
af: Okhotnikov V. V. Vitaly Vladimirovich
Udgivet: (2018)

Современные направления совершенствования бурового инструмента типа PDC
Udgivet: (2021)

Возможность внедрения углеродных нанотрубок в структуру поликристаллического CVD алмаза
af: Митулинский А. С. Александр Сергеевич
Udgivet: (2023)

Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System
Udgivet: (2017)

Ion-Induced Defects in Graphite: A Combined Kelvin Probe and Raman Microscopy Investigation
Udgivet: (2019)

Mechanism of Protective Membrane Formation on the Surface of Metal-Bonded Diamond Disks
af: Yanyushkin А. S.
Udgivet: (2014)

High temperature tribology of heavily boron doped diamond films against steel
af: Gaydaychuk A. V. Alexander Valerievich
Udgivet: (2020)

Spectral and kinetic characteristics of the pulsed cathodoluminescence of a natural IIa-type diamond
Udgivet: (2007)

Tribological and mechanical properties of diamond films synthesized with high methane concentration
af: Gaydaychuk A. V. Alexander Valerievich
Udgivet: (2019)