APA (7th ed.) Citation

Sidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, & Bleykher G. A. Galina Alekseevna. (2023). Magnetron deposition of copper oxide coatings in a metallic mode enhanced by RF-ICP source: A role of substrate biasing. 2023. https://doi.org/10.1016/j.vacuum.2023.111956

Chicago Style (17th ed.) Citation

Sidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, and Bleykher G. A. Galina Alekseevna. Magnetron Deposition of Copper Oxide Coatings in a Metallic Mode Enhanced by RF-ICP Source: A Role of Substrate Biasing. 2023, 2023. https://doi.org/10.1016/j.vacuum.2023.111956.

MLA (9th ed.) Citation

Sidelev D. V. Dmitry Vladimirovich, et al. Magnetron Deposition of Copper Oxide Coatings in a Metallic Mode Enhanced by RF-ICP Source: A Role of Substrate Biasing. 2023, 2023. https://doi.org/10.1016/j.vacuum.2023.111956.