Sidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, & Bleykher G. A. Galina Alekseevna. (2023). Magnetron deposition of copper oxide coatings in a metallic mode enhanced by RF-ICP source: A role of substrate biasing; Vacuum; Vol. 211. 2023. https://doi.org/10.1016/j.vacuum.2023.111956
Cita Chicago (17th ed.)Sidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, i Bleykher G. A. Galina Alekseevna. Magnetron Deposition of Copper Oxide Coatings in a Metallic Mode Enhanced by RF-ICP Source: A Role of Substrate Biasing; Vacuum; Vol. 211. 2023, 2023. https://doi.org/10.1016/j.vacuum.2023.111956.
Cita MLA (9th ed.)Sidelev D. V. Dmitry Vladimirovich, et al. Magnetron Deposition of Copper Oxide Coatings in a Metallic Mode Enhanced by RF-ICP Source: A Role of Substrate Biasing; Vacuum; Vol. 211. 2023, 2023. https://doi.org/10.1016/j.vacuum.2023.111956.