APA (7th ed.) Citation

Sidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, & Grudinin V. A. Vladislav Alekseevich. (2023). High-rate magnetron deposition of CuOx films in the metallic mode enhanced by radiofrequency inductively coupled plasma source. 2023. https://doi.org/10.1016/j.vacuum.2022.111551

Chicago Style (17th ed.) Citation

Sidelev D. V. Dmitry Vladimirovich, Voronina E. D. Ekaterina Dmitrievna, and Grudinin V. A. Vladislav Alekseevich. High-rate Magnetron Deposition of CuOx Films in the Metallic Mode Enhanced by Radiofrequency Inductively Coupled Plasma Source. 2023, 2023. https://doi.org/10.1016/j.vacuum.2022.111551.

MLA (9th ed.) Citation

Sidelev D. V. Dmitry Vladimirovich, et al. High-rate Magnetron Deposition of CuOx Films in the Metallic Mode Enhanced by Radiofrequency Inductively Coupled Plasma Source. 2023, 2023. https://doi.org/10.1016/j.vacuum.2022.111551.