Magnetron Deposition of Cr Coatings with RF-ICP Assistance; Coatings; Vol. 12, iss. 10
| Parent link: | Coatings Vol. 12, iss. 10.— 2022.— [1587, 13 p.] |
|---|---|
| Erakunde egilea: | |
| Beste egile batzuk: | , , , , |
| Gaia: | Title screen The article describes a comparative analysis of chromium coatings deposited by magnetron sputtering with and without ion assistance induced by a radiofrequency inductively coupled plasma (RF-ICP) source. Four series of 2 µm-thick Cr coatings were prepared, and then their cross-sectional microstructure, crystal structure and corrosion resistance were investigated by scanning and transmission electron microscopy, X-ray diffraction and a potentiodynamic polarization method. RF-ICP assistance led to significant enhancement (almost twofold) of ion current density in a substrate. The role of RF-ICP assistance in coating properties for planetary-rotated substrates was defined in terms of ion-to-atom ratio in particle flux entering a substrate. Calculations of particle and ion flux densities revealed an increase in ion-to-atom ratio from 0.18 to 1.43 and 0.11 to 0.84 in substrate positions distant from the magnetron sputtering systems depending on their design. RF-ICP assistance is beneficial for depositing dense Cr coatings with increased corrosion resistance in a 3.5 wt.% NaCl solution. The corrosion rate of AISI 321 steel can be decreased from 6.2 × 10−6 to 4.0 × 10−8 mm/year by deposition of the dense Cr coating. |
| Hizkuntza: | ingelesa |
| Argitaratua: |
2022
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| Gaiak: | |
| Sarrera elektronikoa: | https://doi.org/10.3390/coatings12101587 |
| Formatua: | Baliabide elektronikoa Liburu kapitulua |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=668431 |
MARC
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| 200 | 1 | |a Magnetron Deposition of Cr Coatings with RF-ICP Assistance |f D. V. Sidelev, V. A. Grudinin, K. A. Zinkovsky [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 44 tit.] | ||
| 330 | |a The article describes a comparative analysis of chromium coatings deposited by magnetron sputtering with and without ion assistance induced by a radiofrequency inductively coupled plasma (RF-ICP) source. Four series of 2 µm-thick Cr coatings were prepared, and then their cross-sectional microstructure, crystal structure and corrosion resistance were investigated by scanning and transmission electron microscopy, X-ray diffraction and a potentiodynamic polarization method. RF-ICP assistance led to significant enhancement (almost twofold) of ion current density in a substrate. The role of RF-ICP assistance in coating properties for planetary-rotated substrates was defined in terms of ion-to-atom ratio in particle flux entering a substrate. Calculations of particle and ion flux densities revealed an increase in ion-to-atom ratio from 0.18 to 1.43 and 0.11 to 0.84 in substrate positions distant from the magnetron sputtering systems depending on their design. RF-ICP assistance is beneficial for depositing dense Cr coatings with increased corrosion resistance in a 3.5 wt.% NaCl solution. The corrosion rate of AISI 321 steel can be decreased from 6.2 × 10−6 to 4.0 × 10−8 mm/year by deposition of the dense Cr coating. | ||
| 461 | |t Coatings | ||
| 463 | |t Vol. 12, iss. 10 |v [1587, 13 p.] |d 2022 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a magnetron sputtering | |
| 610 | 1 | |a Cr coatings | |
| 610 | 1 | |a corrosion resistance | |
| 610 | 1 | |a RF-ICP assistance | |
| 610 | 1 | |a cross-sectional microstructure | |
| 610 | 1 | |a crystal structure | |
| 610 | 1 | |a магнетронное напыление | |
| 610 | 1 | |a хромовые покрытия | |
| 610 | 1 | |a устойчивость | |
| 610 | 1 | |a коррозии | |
| 610 | 1 | |a поперечное сечение | |
| 701 | 1 | |a Sidelev |b D. V. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences |f 1991- |g Dmitry Vladimirovich |y Tomsk |3 (RuTPU)RU\TPU\pers\34524 |9 17905 | |
| 701 | 1 | |a Grudinin |b V. A. |c physicist |c engineer of Tomsk Polytechnic University |f 1995- |g Vladislav Alekseevich |3 (RuTPU)RU\TPU\pers\42519 |9 21548 | |
| 701 | 1 | |a Zinkovsky |b K. A. |c specialist in the field of nuclear technologies |c engineer of Tomsk Polytechnic University |f 2000- |g Konstantin Alekseevich |3 (RuTPU)RU\TPU\pers\47391 | |
| 701 | 1 | |a Alkenova |b K. A. |g Kamilla Azamatovna | |
| 701 | 1 | |a Bleykher (Bleicher) |b G. A. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences |f 1961- |g Galina Alekseevna |3 (RuTPU)RU\TPU\pers\31496 |9 15657 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа ядерных технологий |b Научно-образовательный центр Б. П. Вейнберга |3 (RuTPU)RU\TPU\col\23561 |9 28358 |
| 801 | 0 | |a RU |b 63413507 |c 20221130 |g RCR | |
| 856 | 4 | |u https://doi.org/10.3390/coatings12101587 | |
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