Effect of short-pulsed ion irradiation on the optical and electrical properties of titanium nitride films deposited by reactive magnetron sputtering; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 526

Effect of short-pulsed ion irradiation on the optical and electrical properties of titanium nitride films deposited by reactive magnetron sputtering; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 526

Bibliographic Details
Parent link:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Vol. 526.— 2022.— [P. 51-59]
Corporate Authors: Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов, Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Научно-производственная лаборатория "Импульсно-пучковых, электроразрядных и плазменных технологий"
Other Authors: Konusov F. V. Fedor Valerievich, Pavlov S. K. Sergey Konstantinovich, Lauk A. L. Aleksandr Lukyanovich, Kabyshev A. V. Alexander Vasilievich, Novikov V. A. Vadim Aleksandrovich, Gadirov R. M. Ruslan Mukhamedzhanovich, Tarbokov V. A. Vladislav Aleksandrovich, Remnev (Remnyov) G. E. Gennady Efimovich
Summary:Title screen
The effect of short-pulsed irradiation with 220 keV carbon ions for fluences of 2.2 × 1013 - 2.1 × 1015 cm−2 on the optical and electrical properties of titanium nitride films deposited by reactive magnetron sputtering on silicon and steel substrates has been studied. Relationships are obtained between the irradiation conditions and the parameters of interband absorption. A relationship has been established between the concentration of defects before and after irradiation, the degree of overlap of their levels and changes in the optical and electrical properties of the films. Reasons of high radiation resistance of the films are discussed. The optical and electrical properties of the films change during irradiation in two stages. The first stage is related to the annihilation of defects, the second stage is associated with their accumulation. Irradiation of films significantly slows down the rate of oxidation of their surface layers and stabilizes the electrical properties.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2022
Subjects:
электронный ресурс
труды учёных ТПУ
ion irradiation
TiN coatings
radiation defects
absorption
ионное облучение
покрытия
радиационные дефекты
поглощение
Online Access:https://doi.org/10.1016/j.nimb.2022.06.011
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=668261

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