APA (7th ed.) Citation

Ghyngazov A. S. Aleksandr Sergeevich, Surzhikov A. P. Anatoly Petrovich, & Gyngazov S. A. Sergey Anatolievich. (2021). Influence of the Substrate Roughness on the Accuracy of Measuring the Impurity Depth Distribution by Secondary-Ion Mass Spectrometry; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 15, iss. 6. 2021. https://doi.org/10.1134/S1027451021060094

Chicago Style (17th ed.) Citation

Ghyngazov A. S. Aleksandr Sergeevich, Surzhikov A. P. Anatoly Petrovich, and Gyngazov S. A. Sergey Anatolievich. Influence of the Substrate Roughness on the Accuracy of Measuring the Impurity Depth Distribution by Secondary-Ion Mass Spectrometry; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 15, Iss. 6. 2021, 2021. https://doi.org/10.1134/S1027451021060094.

MLA (9th ed.) Citation

Ghyngazov A. S. Aleksandr Sergeevich, et al. Influence of the Substrate Roughness on the Accuracy of Measuring the Impurity Depth Distribution by Secondary-Ion Mass Spectrometry; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 15, Iss. 6. 2021, 2021. https://doi.org/10.1134/S1027451021060094.