Magnetron deposition of chromium nitride coatings using a hot chromium target: Influence of magnetron power on the deposition rate and elemental composition; Surface and Coatings Technology; Vol. 433
| Parent link: | Surface and Coatings Technology Vol. 433.— 2022.— [128120, 11 p.] |
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| Korporativní autor: | |
| Další autoři: | , , , , |
| Shrnutí: | Title screen The article focuses on some formation peculiarities of chromium nitride coatings in an argon and nitrogen atmosphere during the magnetron sputtering of a hot chromium target enhanced by a radio-frequency source of inductively-coupled plasma. In the work, the dependence of the deposition rate of coatings on the magnetron power density has been defined, and the contribution of sublimation to deposition rate enhancement has been examined in comparison with conventional sputtering of a cooled target. It has been shown that the dependence of the deposition rate on the magnetron power density is a nonlinearly increasing function of over 18 W/cm2. By experiments and calculations, it has been proven that in the range from 18 to 28 W/cm2 the target sublimation enables an increase in the deposition productivity by a factor from 2 to 12 compared with the cooled target sputtering under the same experimental conditions. For example, in the regime of planetary rotation of the substrates, the deposition rate reaches 5.2 nm/s at 28 W/cm2. The elemental and structural-phase composition of the coatings deposited using the planetary rotation of substrates has been studied depending on a magnetron power density. It has been found that with an intense sublimation on the chromium target surface, the coatings have an inhomogeneous elemental and structural-phase composition. In addition, an alternation of chromium layers with a low content of chromium nitride and layers that mainly consist of chromium nitride has been determined. Режим доступа: по договору с организацией-держателем ресурса |
| Jazyk: | angličtina |
| Vydáno: |
2022
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| Témata: | |
| On-line přístup: | https://doi.org/10.1016/j.surfcoat.2022.128120 |
| Médium: | Elektronický zdroj Kapitola |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=667329 |
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| 200 | 1 | |a Magnetron deposition of chromium nitride coatings using a hot chromium target: Influence of magnetron power on the deposition rate and elemental composition |f V. A. Grudinin, G. A. Bleykher (Bleicher), D. V. Sidelev [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 46 tit.] | ||
| 330 | |a The article focuses on some formation peculiarities of chromium nitride coatings in an argon and nitrogen atmosphere during the magnetron sputtering of a hot chromium target enhanced by a radio-frequency source of inductively-coupled plasma. In the work, the dependence of the deposition rate of coatings on the magnetron power density has been defined, and the contribution of sublimation to deposition rate enhancement has been examined in comparison with conventional sputtering of a cooled target. It has been shown that the dependence of the deposition rate on the magnetron power density is a nonlinearly increasing function of over 18 W/cm2. By experiments and calculations, it has been proven that in the range from 18 to 28 W/cm2 the target sublimation enables an increase in the deposition productivity by a factor from 2 to 12 compared with the cooled target sputtering under the same experimental conditions. For example, in the regime of planetary rotation of the substrates, the deposition rate reaches 5.2 nm/s at 28 W/cm2. The elemental and structural-phase composition of the coatings deposited using the planetary rotation of substrates has been studied depending on a magnetron power density. It has been found that with an intense sublimation on the chromium target surface, the coatings have an inhomogeneous elemental and structural-phase composition. In addition, an alternation of chromium layers with a low content of chromium nitride and layers that mainly consist of chromium nitride has been determined. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 338 | |b Российский фонд фундаментальных исследований |d 20-21-00037 | ||
| 461 | |t Surface and Coatings Technology | ||
| 463 | |t Vol. 433 |v [128120, 11 p.] |d 2022 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a chromium nitride coatings | |
| 610 | 1 | |a hot target | |
| 610 | 1 | |a mechanical properties | |
| 610 | 1 | |a magnetron sputtering | |
| 610 | 1 | |a sublimation | |
| 610 | 1 | |a high-rate deposition | |
| 610 | 1 | |a покрытия | |
| 610 | 1 | |a магнетронное напыление | |
| 610 | 1 | |a сублимация | |
| 610 | 1 | |a высокоскоростное осаждение | |
| 701 | 1 | |a Grudinin |b V. A. |c physicist |c engineer of Tomsk Polytechnic University |f 1995- |g Vladislav Alekseevich |3 (RuTPU)RU\TPU\pers\42519 |9 21548 | |
| 701 | 1 | |a Bleykher (Bleicher) |b G. A. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences |f 1961- |g Galina Alekseevna |3 (RuTPU)RU\TPU\pers\31496 |9 15657 | |
| 701 | 1 | |a Sidelev |b D. V. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences |f 1991- |g Dmitry Vladimirovich |y Tomsk |3 (RuTPU)RU\TPU\pers\34524 |9 17905 | |
| 701 | 1 | |a Yuriev |b Yu. N. |c specialist in the field of hydrogen energy |c Head of the laboratory of Tomsk Polytechnic University, Associate Scientist |f 1984- |g Yuri Nikolaevich |3 (RuTPU)RU\TPU\pers\31508 |9 15669 | |
| 701 | 1 | |a Lomygin |b A. D. |c physicist |c Head of Laboratory, Tomsk Polytechnic University |f 1997- |g Anton Dmitrievich |3 (RuTPU)RU\TPU\pers\45578 |9 21942 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа ядерных технологий |b Научно-образовательный центр Б. П. Вейнберга |3 (RuTPU)RU\TPU\col\23561 |9 28358 |
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