Solid particle erosion of CVD diamond films deposited at different methane concentration

Solid particle erosion of CVD diamond films deposited at different methane concentration

Bibliografski detalji
Parent link:Wear
Vol. 494-495.— 2022.— [204239, 5 p.]
Autori kompanije: Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов, Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Научно-производственная лаборатория "Импульсно-пучковых, электроразрядных и плазменных технологий"
Daljnji autori: Gaydaychuk A. V. Alexander Valerievich, Linnik S. A. Stepan Andreevich, Mitulinsky A. S. Aleksandr Sergeevich, Zenkin S. P. Sergey Petrovich
Sažetak:Title screen
Thick diamond films are synthesized on Si substrate by HFCVD method with different methane concentration (up to 21.9 vol %) in the gas mixture. The erosion resistance of the obtained coatings was investigated by the solid particle erosion of SiC. We show that, regardless of the microstructure, diamond coatings exhibit the same erosion mechanisms. Ring and radial cracks, as well as pin-holes and a local delamination of diamond film were detected for all synthesized films. We found that despite the high degree of initial roughness, the microcrystalline diamond coating showed the maximum erosion resistance at all stages of erosion experiments.
Режим доступа: по договору с организацией-держателем ресурса
Izdano: 2022
Teme:
труды учёных ТПУ
электронный ресурс
diamond film
erosion wear
HFCVD
алмазные пленки
эрозионный износ
Online pristup:https://doi.org/10.1016/j.wear.2022.204239
Format: Elektronički Poglavlje knjige
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=667193
Opis
Sažetak:Title screen
Thick diamond films are synthesized on Si substrate by HFCVD method with different methane concentration (up to 21.9 vol %) in the gas mixture. The erosion resistance of the obtained coatings was investigated by the solid particle erosion of SiC. We show that, regardless of the microstructure, diamond coatings exhibit the same erosion mechanisms. Ring and radial cracks, as well as pin-holes and a local delamination of diamond film were detected for all synthesized films. We found that despite the high degree of initial roughness, the microcrystalline diamond coating showed the maximum erosion resistance at all stages of erosion experiments.
Режим доступа: по договору с организацией-держателем ресурса
Digitalni identifikator objekta:10.1016/j.wear.2022.204239

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