Determination of the Electron Density and Electron Temperature in A Magnetron Discharge Plasma Using Optical Spectroscopy and the Collisional-Radiative Model of Argon; Russian Physics Journal; Vol. 60, iss. 5
| Parent link: | Russian Physics Journal Vol. 60, iss. 5.— 2017.— [P. 765–775] |
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| Korporativna značnica: | |
| Drugi avtorji: | , , , , , |
| Izvleček: | Title screen A method for determining the electron temperature and electron density in a plasma is proposed that is based on minimization of the difference between the experimental relative intensities of the spectral argon (Ar) lines and those same intensities calculated with the aid of the collisional-radiative model. The model describes the kinetics of the ground state and 40 excited states of the Ar atom and takes into account the following processes: excitation and deactivation of the states of the atom by electron impact, radiative decay of the excited states, self-absorption of radiation, ionization of excited states by electron impact, and quenching of metastable states as a consequence of collisions with the chamber walls. Using the given method, we have investigated the plasma of a magnetron discharge on a laboratory setup for intermediate-frequency magnetron sputtering for a few selected operating regimes. |
| Jezik: | angleščina |
| Izdano: |
2017
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| Teme: | |
| Online dostop: | https://doi.org/10.1007/s11182-017-1137-0 |
| Format: | Elektronski Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=666975 |
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| 200 | 1 | |a Determination of the Electron Density and Electron Temperature in A Magnetron Discharge Plasma Using Optical Spectroscopy and the Collisional-Radiative Model of Argon |f K. E. Evdokimov, M. E. Konishchev, V. F. Pichugin [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 23 tit.] | ||
| 330 | |a A method for determining the electron temperature and electron density in a plasma is proposed that is based on minimization of the difference between the experimental relative intensities of the spectral argon (Ar) lines and those same intensities calculated with the aid of the collisional-radiative model. The model describes the kinetics of the ground state and 40 excited states of the Ar atom and takes into account the following processes: excitation and deactivation of the states of the atom by electron impact, radiative decay of the excited states, self-absorption of radiation, ionization of excited states by electron impact, and quenching of metastable states as a consequence of collisions with the chamber walls. Using the given method, we have investigated the plasma of a magnetron discharge on a laboratory setup for intermediate-frequency magnetron sputtering for a few selected operating regimes. | ||
| 461 | |t Russian Physics Journal | ||
| 463 | |t Vol. 60, iss. 5 |v [P. 765–775] |d 2017 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a plasma diagnostics | |
| 610 | 1 | |a optical spectroscopy | |
| 610 | 1 | |a collisional-radiative model | |
| 610 | 1 | |a reactive magnetronsputtering | |
| 610 | 1 | |a диагностика | |
| 610 | 1 | |a плазма | |
| 610 | 1 | |a оптическая спектроскопия | |
| 610 | 1 | |a реактивное распыление | |
| 610 | 1 | |a магнетронное распыление | |
| 610 | 1 | |a аргон | |
| 701 | 1 | |a Evdokimov |b K. E. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1976- |g Kirill Evgenievich |3 (RuTPU)RU\TPU\pers\31791 |9 15902 | |
| 701 | 1 | |a Konishchev |b M. E. |c physicist |c Senior Lecturer of Tomsk Polytechnic University |f 1987- |g Maksim Evgenievich |3 (RuTPU)RU\TPU\pers\34212 |9 17743 | |
| 701 | 1 | |a Pichugin |b V. F. |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |c Physicist |f 1944- |g Vladimir Fyodorovich |3 (RuTPU)RU\TPU\pers\30933 | |
| 701 | 1 | |a Pustovalova |b A. A. | |
| 701 | 1 | |a Ivanova |b N. M. |c physicist |c senior assistant of Tomsk Polytechnic University |f 1991- |g Nina Mikhailovna |3 (RuTPU)RU\TPU\pers\34210 | |
| 701 | 0 | |a Sun Zhilei |c physicist |c Research Engineer of Tomsk Polytechnic University |f 1992- |3 (RuTPU)RU\TPU\pers\46147 | |
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| 856 | 4 | 0 | |u https://doi.org/10.1007/s11182-017-1137-0 |
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