Talbot photolithography optimization with engineered hybrid metal-dielectric mask: High-contrast and highly-uniform Talbot stripes

Talbot photolithography optimization with engineered hybrid metal-dielectric mask: High-contrast and highly-uniform Talbot stripes

Bibliografiske detaljer
Parent link:	Optics and Laser Technology Vol. 148.— 2022.— [107776, 8 p.]
Hovedforfatter:	Geynts Yu. E. Yury Elmarovich
Institution som forfatter:	Национальный исследовательский Томский политехнический университет Инженерная школа неразрушающего контроля и безопасности Отделение электронной инженерии
Andre forfattere:	Minin I. V. Igor Vladilenovich, Minin O. V. Oleg Vladilenovich
Summary:	Title screen Conventional projection Talbot lithography usually employs opaque (amplitude) or transparent (phase) masks for creating a periodic array of Fresnel diffraction fringes in the photosensitive substrate. For particular mask design the longitudinal periodicity of Talbot carpet can be avoided producing quasi uniform striped pattern (Talbot stripes). We propose a novel hybrid amplitude-phase mask which is engineered for obtaining extremely smooth Talbot stripes and simultaneously high lateral optical contrast and extreme spatial resolution better than a third of laser wavelength. By means of the numerical simulations, we demonstrate the robustness of produced striped diffraction patterns against mask design deviation and light incidence angle variations. The reproducibility of the Talbot stripes is reported also for 1D and 2D metal-dielectric projection masks. Режим доступа: по договору с организацией-держателем ресурса
Sprog:	engelsk
Udgivet:	2022
Fag:	электронный ресурс труды учёных ТПУ Talbot lithography wavelength-scaled diffraction grating optical contrast projection mask литография дифракционные решетки масштабирование оптический контраст фотолитография полосы Тальбота
Online adgang:	https://doi.org/10.1016/j.optlastec.2021.107776
Format:	Electronisk Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=666418

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