High-Intensity Implantation With an Ion Beam's Energy Impact on Materials
| Parent link: | IEEE Transactions on Plasma Science Vol. 49, iss. 9.— 2021.— [21100128, 6 p.] |
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| Autor Principal: | |
| Autor Corporativo: | |
| Summary: | Title screen This article describes a new method of modifying the properties of materials based on synergistic ion implantation and repetitively pulsed energy impact on the materials' microstructures using high-intensity ion beams with microsubmillisecond durations. High-intensity implantation was carried out at ion beam current densities of several amperes per square centimeter at ion energies of several tens of keV with pulse durations ranging from several tens to several hundred microseconds. These ion beam parameters allowed us to obtain radiation-enhanced diffusion of dopants to depths exceeding the ion beam's projective range by several orders of magnitude. The high power density and energy density of the ion beam provided fast heating and ultrafast cooling of the near-surface layer due to high-speed heat transfer into the target materials. The results of numerical modeling of the temperature field distribution under the ion beam's action on the surface with a pulse duration of 50 [mu]s at an energy density of approximately 10 J/cm{2} are presented. The advantages and disadvantages of ion beam formation with a power density of more than 10{5} W/cm{2} based on plasma immersion ion extraction or in an ion source are analyzed. The possibility of forming a pulsed beam of titanium ions from vacuum arc discharge plasma with a current density of approximately 5 A/cm{2} and a pulse duration of 95 [mu]s was experimentally confirmed. Режим доступа: по договору с организацией-держателем ресурса |
| Idioma: | inglés |
| Publicado: |
2021
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| Subjects: | |
| Acceso en liña: | https://doi.org/10.1109/TPS.2021.3073942 |
| Formato: | Electrónico Capítulo de libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=665274 |
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| 200 | 1 | |a High-Intensity Implantation With an Ion Beam's Energy Impact on Materials |f A. I. Ryabchikov | |
| 300 | |a Title screen | ||
| 320 | |a [References: 67 tit.] | ||
| 330 | |a This article describes a new method of modifying the properties of materials based on synergistic ion implantation and repetitively pulsed energy impact on the materials' microstructures using high-intensity ion beams with microsubmillisecond durations. High-intensity implantation was carried out at ion beam current densities of several amperes per square centimeter at ion energies of several tens of keV with pulse durations ranging from several tens to several hundred microseconds. These ion beam parameters allowed us to obtain radiation-enhanced diffusion of dopants to depths exceeding the ion beam's projective range by several orders of magnitude. The high power density and energy density of the ion beam provided fast heating and ultrafast cooling of the near-surface layer due to high-speed heat transfer into the target materials. The results of numerical modeling of the temperature field distribution under the ion beam's action on the surface with a pulse duration of 50 [mu]s at an energy density of approximately 10 J/cm{2} are presented. The advantages and disadvantages of ion beam formation with a power density of more than 10{5} W/cm{2} based on plasma immersion ion extraction or in an ion source are analyzed. The possibility of forming a pulsed beam of titanium ions from vacuum arc discharge plasma with a current density of approximately 5 A/cm{2} and a pulse duration of 95 [mu]s was experimentally confirmed. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t IEEE Transactions on Plasma Science | ||
| 463 | |t Vol. 49, iss. 9 |v [21100128, 6 p.] |d 2021 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a energy impact | |
| 610 | 1 | |a high-Intensity Implantation | |
| 610 | 1 | |a ion beam | |
| 610 | 1 | |a material properties modification | |
| 610 | 1 | |a synergistic | |
| 610 | 1 | |a энергетическое воздействие | |
| 610 | 1 | |a имплантация | |
| 610 | 1 | |a модификации | |
| 610 | 1 | |a свойства | |
| 610 | 1 | |a материалы | |
| 610 | 1 | |a синергетика | |
| 610 | 1 | |a ионные пучки | |
| 700 | 1 | |a Ryabchikov |b A. I. |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |c physicist |f 1950- |g Aleksandr Ilyich |3 (RuTPU)RU\TPU\pers\30912 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа ядерных технологий |b Научная лаборатория высокоинтенсивной имплантации ионов |3 (RuTPU)RU\TPU\col\23698 |
| 801 | 2 | |a RU |b 63413507 |c 20211223 |g RCR | |
| 856 | 4 | |u https://doi.org/10.1109/TPS.2021.3073942 | |
| 942 | |c CF | ||