Thermionic Vacuum Arc-A Versatile Technology for Thin Film Deposition and Its Applications; Coatings; Vol. 10, iss. 3
| Parent link: | Coatings Vol. 10, iss. 3.— 2020.— [211, 48 p.] |
|---|---|
| מחברים אחרים: | , , , , |
| סיכום: | Title screen This review summarizes the more-than-25-years of development of the so-called thermionic vacuum arc (TVA). TVA is an anodic arc discharge in vapors of the material to be deposited; the energy for its melting is delivered by means of a focused electron beam. The resulting material ions fall at the substrate where they form a well-adhesive layer; the ion energy is controllable. The deposited layers are, as a rule, free from droplets typical for cathodic arc deposition systems and the thermal stress of the substrates being coated is low. TVA is especially suitable for processing refractory metals, e.g., carbon or tungsten, however, in the course of time, various useful applications of this system originated. They include layers for fusion application, hard coatings, low-friction coatings, biomedical-applicable films, materials for optoelectronics, and for solid-state batteries. Apart from the diagnostic of the film properties, also the diagnostic of the TVA discharge itself as well as of the by TVA generated plasma was performed. The research and application of the TVA proceeds in broad international collaboration. At present, the TVA technology has found its firm place among the different procedures for thin film deposition. |
| שפה: | אנגלית |
| יצא לאור: |
2020
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| נושאים: | |
| גישה מקוונת: | https://doi.org/10.3390/coatings10030211 |
| פורמט: | MixedMaterials אלקטרוני Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=665023 |
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| 200 | 1 | |a Thermionic Vacuum Arc-A Versatile Technology for Thin Film Deposition and Its Applications |f R. Vladoiu, M. Tichy, A. Mandes [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 253 tit.] | ||
| 330 | |a This review summarizes the more-than-25-years of development of the so-called thermionic vacuum arc (TVA). TVA is an anodic arc discharge in vapors of the material to be deposited; the energy for its melting is delivered by means of a focused electron beam. The resulting material ions fall at the substrate where they form a well-adhesive layer; the ion energy is controllable. The deposited layers are, as a rule, free from droplets typical for cathodic arc deposition systems and the thermal stress of the substrates being coated is low. TVA is especially suitable for processing refractory metals, e.g., carbon or tungsten, however, in the course of time, various useful applications of this system originated. They include layers for fusion application, hard coatings, low-friction coatings, biomedical-applicable films, materials for optoelectronics, and for solid-state batteries. Apart from the diagnostic of the film properties, also the diagnostic of the TVA discharge itself as well as of the by TVA generated plasma was performed. The research and application of the TVA proceeds in broad international collaboration. At present, the TVA technology has found its firm place among the different procedures for thin film deposition. | ||
| 461 | |t Coatings | ||
| 463 | |t Vol. 10, iss. 3 |v [211, 48 p.] |d 2020 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a thermionic vacuum arc | |
| 610 | 1 | |a thin film deposition | |
| 610 | 1 | |a fusion | |
| 610 | 1 | |a refractory materials | |
| 610 | 1 | |a coatings | |
| 610 | 1 | |a вакуумные дуги | |
| 610 | 1 | |a осаждение | |
| 610 | 1 | |a тонкие пленки | |
| 610 | 1 | |a огнеупорные материалы | |
| 610 | 1 | |a покрытия | |
| 701 | 1 | |a Vladoiu |b R. |g Rodica | |
| 701 | 1 | |a Tichy |b M. |c chemist |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |f 1947- |g Milan |3 (RuTPU)RU\TPU\pers\35771 | |
| 701 | 1 | |a Mandes |b A. |g Aurelia | |
| 701 | 1 | |a Dinca |b V. |g Virginia | |
| 701 | 1 | |a Kudrn |b P. |g Pavel | |
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| 856 | 4 | |u https://doi.org/10.3390/coatings10030211 | |
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