Floating harmonic probe for diagnostic of pulsed discharges; Surface and Coatings Technology; Vol. 357
| Parent link: | Surface and Coatings Technology Vol. 357.— 2019.— [P. 879-885] |
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| অন্যান্য লেখক: | , , , , , |
| সংক্ষিপ্ত: | Title screen The floating harmonic probe (FHP) is a relatively new plasma diagnostic method for electron temperature and positive ion density measurement, which can be used in conditions when insulating films are being deposited on the probe and, consequently, the classical Langmuir probe method fails. Recently an extension of this method called PDHAM - phase delay harmonic analysis method - was proposed that is applicable also to pulsed discharges. In this contribution, we study the possible limitations of this new method and present the comparison of the plasma density and the electron temperature determined by PDHAM with that obtained by the time-resolved Langmuir probe in a pulsed planar magnetron discharge. In addition, we present the double probe technique for applications in pulsed plasmas and we compare its results with those of a single FHP. The experiments were performed in argon at pressures several Pa in a non-reactive regime, when no insulating film was deposited on the probes. Режим доступа: по договору с организацией-держателем ресурса |
| ভাষা: | ইংরেজি |
| প্রকাশিত: |
2019
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| বিষয়গুলি: | |
| অনলাইন ব্যবহার করুন: | https://doi.org/10.1016/j.surfcoat.2018.10.039 |
| বিন্যাস: | বৈদ্যুতিক গ্রন্থের অধ্যায় |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=664994 |
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| 200 | 1 | |a Floating harmonic probe for diagnostic of pulsed discharges |f M Zanaska, Z. Turek, Z. Hubicka [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 37 tit.] | ||
| 330 | |a The floating harmonic probe (FHP) is a relatively new plasma diagnostic method for electron temperature and positive ion density measurement, which can be used in conditions when insulating films are being deposited on the probe and, consequently, the classical Langmuir probe method fails. Recently an extension of this method called PDHAM - phase delay harmonic analysis method - was proposed that is applicable also to pulsed discharges. In this contribution, we study the possible limitations of this new method and present the comparison of the plasma density and the electron temperature determined by PDHAM with that obtained by the time-resolved Langmuir probe in a pulsed planar magnetron discharge. In addition, we present the double probe technique for applications in pulsed plasmas and we compare its results with those of a single FHP. The experiments were performed in argon at pressures several Pa in a non-reactive regime, when no insulating film was deposited on the probes. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Surface and Coatings Technology | ||
| 463 | |t Vol. 357 |v [P. 879-885] |d 2019 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a floating harmonic probe | |
| 610 | 1 | |a phase delay harmonic analysis method | |
| 610 | 1 | |a double floating harmonic probe | |
| 610 | 1 | |a pulsed discharge | |
| 610 | 1 | |a датчики | |
| 701 | 1 | |a Zanaska |b M | |
| 701 | 1 | |a Turek |b Z. | |
| 701 | 1 | |a Hubicka |b Z. | |
| 701 | 1 | |a Cada |b M. | |
| 701 | 1 | |a Kudrna |b P. | |
| 701 | 1 | |a Tichy |b M. |c chemist |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |f 1947- |g Milan |3 (RuTPU)RU\TPU\pers\35771 | |
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| 856 | 4 | |u https://doi.org/10.1016/j.surfcoat.2018.10.039 | |
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