Optical Properties of Aluminum- and Silicon-Nitride Films and Al–Si–N Nanocomposite Coatings Deposited by Reactive Magnetron Sputtering; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 15, iss. 1

Optical Properties of Aluminum- and Silicon-Nitride Films and Al–Si–N Nanocomposite Coatings Deposited by Reactive Magnetron Sputtering; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 15, iss. 1

Λεπτομέρειες βιβλιογραφικής εγγραφής
Parent link:	Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques Vol. 15, iss. 1.— 2021.— [P. 139-146]
Συγγραφή απο Οργανισμό/Αρχή:	Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов
Άλλοι συγγραφείς:	Konusov F. V. Fedor Valerievich, Pavlov S. K. Sergey Konstantinovich, Lauk A. L. Aleksandr Lukyanovich, Kabyshev A. V. Aleksandr Vasiljevich, Gadirov R. M. Ruslan Mukhamedzhanovich
Περίληψη:	Title screen In this paper, we study the optical properties of aluminum- and silicon-nitride films and Al–Si–N coatings with variable atomic composition deposited by reactive magnetron sputtering on glass, silicon, and steel substrates. The absorption and luminescence characteristics are determined by the composition of the coatings and microstructure and depend on the physical properties of the substrate. The absorption and luminescence centers are associated with intrinsic defects in the nitrides and their simplest complexes. The relationships between the accumulation of growth defects, their interaction, the type of distribution of localized states, the band gap, and the stability of the optical properties are established. At an increase in the silicon content in the coatings, the degree of static induced disorder increases, and the contribution of the continuous distribution of the defect levels and interband absorption increases. Silicon-containing defects stabilize the optical properties of the coatings. Режим доступа: по договору с организацией-держателем ресурса
Γλώσσα:	Αγγλικά
Έκδοση:	2021
Θέματα:	электронный ресурс труды учёных ТПУ nitrides films coatings band gap absorption coefficient interband absorption localized states growth defects нитриды покрытия коэффициент поглощения
Διαθέσιμο Online:	https://doi.org/10.1134/S1027451021010274
Μορφή:	Ηλεκτρονική πηγή Κεφάλαιο βιβλίου
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=664739

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