Optical Properties of Aluminum- and Silicon-Nitride Films and Al–Si–N Nanocomposite Coatings Deposited by Reactive Magnetron Sputtering; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 15, iss. 1

Optical Properties of Aluminum- and Silicon-Nitride Films and Al–Si–N Nanocomposite Coatings Deposited by Reactive Magnetron Sputtering; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 15, iss. 1

Bibliographic Details
Parent link:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
Vol. 15, iss. 1.— 2021.— [P. 139-146]
Corporate Author: Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов
Other Authors: Konusov F. V. Fedor Valerievich, Pavlov S. K. Sergey Konstantinovich, Lauk A. L. Aleksandr Lukyanovich, Kabyshev A. V. Aleksandr Vasiljevich, Gadirov R. M. Ruslan Mukhamedzhanovich
Summary:Title screen
In this paper, we study the optical properties of aluminum- and silicon-nitride films and Al–Si–N coatings with variable atomic composition deposited by reactive magnetron sputtering on glass, silicon, and steel substrates. The absorption and luminescence characteristics are determined by the composition of the coatings and microstructure and depend on the physical properties of the substrate. The absorption and luminescence centers are associated with intrinsic defects in the nitrides and their simplest complexes. The relationships between the accumulation of growth defects, their interaction, the type of distribution of localized states, the band gap, and the stability of the optical properties are established. At an increase in the silicon content in the coatings, the degree of static induced disorder increases, and the contribution of the continuous distribution of the defect levels and interband absorption increases. Silicon-containing defects stabilize the optical properties of the coatings.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2021
Subjects:
электронный ресурс
труды учёных ТПУ
nitrides
films
coatings
band gap
absorption coefficient
interband absorption
localized states
growth defects
нитриды
покрытия
коэффициент поглощения
Online Access:https://doi.org/10.1134/S1027451021010274
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=664739

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