Zenkin S. P. Sergey Petrovich, Gaydaychuk A. V. Alexander Valerievich, & Linnik S. A. Stepan Andreevich. (2021). Effects of sputtering gas on the microstructure of Ir thin films deposited by HiPIMS and pulsed DC sputtering. 2021. https://doi.org/10.1016/j.surfcoat.2021.127038
Citace podle Chicago (17th ed.)Zenkin S. P. Sergey Petrovich, Gaydaychuk A. V. Alexander Valerievich, a Linnik S. A. Stepan Andreevich. Effects of Sputtering Gas on the Microstructure of Ir Thin Films Deposited by HiPIMS and Pulsed DC Sputtering. 2021, 2021. https://doi.org/10.1016/j.surfcoat.2021.127038.
Citace podle MLA (9th ed.)Zenkin S. P. Sergey Petrovich, et al. Effects of Sputtering Gas on the Microstructure of Ir Thin Films Deposited by HiPIMS and Pulsed DC Sputtering. 2021, 2021. https://doi.org/10.1016/j.surfcoat.2021.127038.