APA (7th ed.) Citation

Zenkin S. P. Sergey Petrovich, Gaydaychuk A. V. Alexander Valerievich, & Linnik S. A. Stepan Andreevich. (2021). Effects of sputtering gas on the microstructure of Ir thin films deposited by HiPIMS and pulsed DC sputtering; Surface and Coatings Technology; Vol. 412. 2021. https://doi.org/10.1016/j.surfcoat.2021.127038

Chicago Style (17th ed.) Citation

Zenkin S. P. Sergey Petrovich, Gaydaychuk A. V. Alexander Valerievich, and Linnik S. A. Stepan Andreevich. Effects of Sputtering Gas on the Microstructure of Ir Thin Films Deposited by HiPIMS and Pulsed DC Sputtering; Surface and Coatings Technology; Vol. 412. 2021, 2021. https://doi.org/10.1016/j.surfcoat.2021.127038.

MLA (9th ed.) Citation

Zenkin S. P. Sergey Petrovich, et al. Effects of Sputtering Gas on the Microstructure of Ir Thin Films Deposited by HiPIMS and Pulsed DC Sputtering; Surface and Coatings Technology; Vol. 412. 2021, 2021. https://doi.org/10.1016/j.surfcoat.2021.127038.