Plasma-immersion formation of high-intensity gaseous ion beams; Vacuum; Vol. 165
| Parent link: | Vacuum Vol. 165.— 2019.— [P. 127-133] |
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| Erakunde egilea: | |
| Beste egile batzuk: | , , , , , |
| Gaia: | Title screen The symbiosis of plasma-immersion extraction of ions and their subsequent ballistic focusing in the hemisphere geometry of the focusing system was used to form a high intensity nitrogen, argon, and hydrogen ion beams. The gas-discharge plasma was formed using a hot-cathode-arc discharge source. The regularities of the formation of high-intensity ion beams of various gases from according to the pressures of the working gases, the plasma density depending dependence on the bias potential amplitudes in the range of 0.9–2.4?kV, frequencies in the range of 10–100?kHz and pulse durations in the range of 2–80 µs were investigated. The possibility of the stable forming of axially symmetric gas ion beams with a current density of up to hundreds of mA/cm2 was shown. Nitrogen ion beams with a maximum current density of 0.7 A/cm2 at the ion current of 0.6 A were obtained. Studies at nitrogen pressures in the range of 0.3–1.8?Pa revealed that a decrease in the gas pressure during the generation of a gas-discharge plasma caused a significant increase in the ion current amplitude at the collector. Режим доступа: по договору с организацией-держателем ресурса |
| Hizkuntza: | ingelesa |
| Argitaratua: |
2019
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| Gaiak: | |
| Sarrera elektronikoa: | https://doi.org/10.1016/j.vacuum.2019.04.024 |
| Formatua: | Baliabide elektronikoa Liburu kapitulua |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=664276 |
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| 200 | 1 | |a Plasma-immersion formation of high-intensity gaseous ion beams |f A. I. Ryabchikov, D. O. Sivin, O. S. Korneva [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 35 tit.] | ||
| 330 | |a The symbiosis of plasma-immersion extraction of ions and their subsequent ballistic focusing in the hemisphere geometry of the focusing system was used to form a high intensity nitrogen, argon, and hydrogen ion beams. The gas-discharge plasma was formed using a hot-cathode-arc discharge source. The regularities of the formation of high-intensity ion beams of various gases from according to the pressures of the working gases, the plasma density depending dependence on the bias potential amplitudes in the range of 0.9–2.4?kV, frequencies in the range of 10–100?kHz and pulse durations in the range of 2–80 µs were investigated. The possibility of the stable forming of axially symmetric gas ion beams with a current density of up to hundreds of mA/cm2 was shown. Nitrogen ion beams with a maximum current density of 0.7 A/cm2 at the ion current of 0.6 A were obtained. Studies at nitrogen pressures in the range of 0.3–1.8?Pa revealed that a decrease in the gas pressure during the generation of a gas-discharge plasma caused a significant increase in the ion current amplitude at the collector. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Vacuum | ||
| 463 | |t Vol. 165 |v [P. 127-133] |d 2019 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a plasma-immersion extraction | |
| 610 | 1 | |a plasma ions acceleration | |
| 610 | 1 | |a ballistic focusing | |
| 610 | 1 | |a repetitively pulsed high-intensity beam of gas ions | |
| 701 | 1 | |a Ryabchikov |b A. I. |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |c physicist |f 1950- |g Aleksandr Ilyich |3 (RuTPU)RU\TPU\pers\30912 | |
| 701 | 1 | |a Sivin |b D. O. |c physicist |c Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences |f 1978- |g Denis Olegovich |3 (RuTPU)RU\TPU\pers\34240 | |
| 701 | 1 | |a Korneva |b O. S. |c physicist |c engineer of Tomsk Polytechnic University |f 1988- |g Olga Sergeevna |3 (RuTPU)RU\TPU\pers\37178 |9 20156 | |
| 701 | 1 | |a Ananin |b P. S. |c physicist |c senior researcher of Tomsk Polytechnic University, candidate of physical and mathematical sciences |f 1942- |g Petr Semenovich |3 (RuTPU)RU\TPU\pers\35673 | |
| 701 | 1 | |a Bumagina |b A. I. |c physicist |c Associate Scientist of Tomsk Polytechnic University |f 1987- |g Anna Ivanovna |3 (RuTPU)RU\TPU\pers\34326 |9 17835 | |
| 701 | 1 | |a Stepanov |b I. B. |c physicist |c Head of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences |f 1968- |g Igor Borisovich |3 (RuTPU)RU\TPU\pers\34218 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа ядерных технологий |b Научная лаборатория высокоинтенсивной имплантации ионов |3 (RuTPU)RU\TPU\col\23698 |
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