Correction of the Distribution Profiles of the Intensities of Elements Considering the Uneven Dispersion of the Glow-Discharge Optical Emission Spectrometer for Multilayer Coatings Analysis

Correction of the Distribution Profiles of the Intensities of Elements Considering the Uneven Dispersion of the Glow-Discharge Optical Emission Spectrometer for Multilayer Coatings Analysis

Бібліографічні деталі
Parent link:Energy Fluxes and Radiation Effects (EFRE-2020 online): proceedings of 7th International Congress, September 14-26, 2020, Tomsk, Russia/ National Research Tomsk Polytechnic University (TPU) ; Institute of Electrical and Electronics Engineers (IEEE) ; ed. N. A. Ratakhin. [P. 1155-1159].— , 2020
Співавтор: Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Отделение экспериментальной физики
Інші автори: Shulepov I. A. Ivan Anisimovich, Lomygin A. D. Anton Dmitrievich, Laptev R. S. Roman Sergeevich, Kashkarov E. B. Egor Borisovich, Syrtanov M. S. Maksim Sergeevich
Резюме:Title screen
Multilayer coatings are of great interest in applications ranging from optical to protective coatings. Several interesting properties of multilayer systems are due to the presence of an unusual structure, multiple boundaries, etc. As with any coating, multilayer systems require material degradation control when used and quality control when coatings are formed. Glow discharge optical emission spectrometry (GD-OES) is one of the methods allowing to resolve ultra-thin layers and have high depth resolution. GD-OES has some problems that affect the research results. One of them is obtaining depth distribution profiles of concentrations in heterogeneous structures. This paper shows the possibility to correct spectra after analysis by taking into account the non-uniformity of atomization due to the presence of instrumental and physical artefacts, as well as using a set of methods GD-OES - EAS (electronic Auger Spectroscopy) to obtain the distribution of concentrations at depth.
Режим доступа: по договору с организацией-держателем ресурса
Опубліковано: 2020
Предмети:
электронный ресурс
труды учёных ТПУ
multilayer coatings
Zr/Nb
GD–OES
EAS
многослойные покрытия
порошки
лазерное спекание
Онлайн доступ:https://doi.org/10.1109/EFRE47760.2020.9241958
Формат: Електронний ресурс Частина з книги
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=663103

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