Correction of the Distribution Profiles of the Intensities of Elements Considering the Uneven Dispersion of the Glow-Discharge Optical Emission Spectrometer for Multilayer Coatings Analysis; Energy Fluxes and Radiation Effects (EFRE-2020 online)
| Parent link: | Energy Fluxes and Radiation Effects (EFRE-2020 online).— 2020.— [P. 1155-1159] |
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| Institution som forfatter: | |
| Andre forfattere: | , , , , |
| Summary: | Title screen Multilayer coatings are of great interest in applications ranging from optical to protective coatings. Several interesting properties of multilayer systems are due to the presence of an unusual structure, multiple boundaries, etc. As with any coating, multilayer systems require material degradation control when used and quality control when coatings are formed. Glow discharge optical emission spectrometry (GD-OES) is one of the methods allowing to resolve ultra-thin layers and have high depth resolution. GD-OES has some problems that affect the research results. One of them is obtaining depth distribution profiles of concentrations in heterogeneous structures. This paper shows the possibility to correct spectra after analysis by taking into account the non-uniformity of atomization due to the presence of instrumental and physical artefacts, as well as using a set of methods GD-OES - EAS (electronic Auger Spectroscopy) to obtain the distribution of concentrations at depth. Режим доступа: по договору с организацией-держателем ресурса |
| Sprog: | engelsk |
| Udgivet: |
2020
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| Fag: | |
| Online adgang: | https://doi.org/10.1109/EFRE47760.2020.9241958 |
| Format: | MixedMaterials Electronisk Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=663103 |
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| 200 | 1 | |a Correction of the Distribution Profiles of the Intensities of Elements Considering the Uneven Dispersion of the Glow-Discharge Optical Emission Spectrometer for Multilayer Coatings Analysis |f I. A. Shulepov, A. Lomygin, R. S. Laptev [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: p. 1159 (13 tit.)] | ||
| 330 | |a Multilayer coatings are of great interest in applications ranging from optical to protective coatings. Several interesting properties of multilayer systems are due to the presence of an unusual structure, multiple boundaries, etc. As with any coating, multilayer systems require material degradation control when used and quality control when coatings are formed. Glow discharge optical emission spectrometry (GD-OES) is one of the methods allowing to resolve ultra-thin layers and have high depth resolution. GD-OES has some problems that affect the research results. One of them is obtaining depth distribution profiles of concentrations in heterogeneous structures. This paper shows the possibility to correct spectra after analysis by taking into account the non-uniformity of atomization due to the presence of instrumental and physical artefacts, as well as using a set of methods GD-OES - EAS (electronic Auger Spectroscopy) to obtain the distribution of concentrations at depth. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 463 | 0 | |0 (RuTPU)RU\TPU\network\34152 |t Energy Fluxes and Radiation Effects (EFRE-2020 online) |o proceedings of 7th International Congress, September 14-26, 2020, Tomsk, Russia |f National Research Tomsk Polytechnic University (TPU) ; Institute of Electrical and Electronics Engineers (IEEE) ; ed. N. A. Ratakhin |v [P. 1155-1159] |d 2020 | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a multilayer coatings | |
| 610 | 1 | |a Zr/Nb | |
| 610 | 1 | |a GD–OES | |
| 610 | 1 | |a EAS | |
| 610 | 1 | |a многослойные покрытия | |
| 610 | 1 | |a порошки | |
| 610 | 1 | |a лазерное спекание | |
| 701 | 1 | |a Shulepov |b I. A. |c physicist |c Engineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1954- |g Ivan Anisimovich |3 (RuTPU)RU\TPU\pers\33092 | |
| 701 | 1 | |a Lomygin |b A. D. |c physicist |c Head of Laboratory, Tomsk Polytechnic University |f 1997- |g Anton Dmitrievich |3 (RuTPU)RU\TPU\pers\45578 |9 21942 | |
| 701 | 1 | |a Laptev |b R. S. |c physicist, specialist in the field of non-destructive testing |c Associate Professor of Tomsk Polytechnic University, Doctor of Technical Sciences |f 1987- |g Roman Sergeevich |3 (RuTPU)RU\TPU\pers\31884 |9 15956 | |
| 701 | 1 | |a Kashkarov |b E. B. |c Physicist |c Associate Professor, Researcher of Tomsk Polytechnic University, Candidate of Physical and Mathematical Sciences |f 1991- |g Egor Borisovich |3 (RuTPU)RU\TPU\pers\34949 |9 18267 | |
| 701 | 1 | |a Syrtanov |b M. S. |c physicist |c engineer of Tomsk Polytechnic University |f 1990- |g Maksim Sergeevich |3 (RuTPU)RU\TPU\pers\34764 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа ядерных технологий |b Отделение экспериментальной физики |3 (RuTPU)RU\TPU\col\23549 |
| 801 | 2 | |a RU |b 63413507 |c 20210203 |g RCR | |
| 856 | 4 | |u https://doi.org/10.1109/EFRE47760.2020.9241958 | |
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